JPS52138072A - Manufacture of silicon single crystal - Google Patents

Manufacture of silicon single crystal

Info

Publication number
JPS52138072A
JPS52138072A JP5432376A JP5432376A JPS52138072A JP S52138072 A JPS52138072 A JP S52138072A JP 5432376 A JP5432376 A JP 5432376A JP 5432376 A JP5432376 A JP 5432376A JP S52138072 A JPS52138072 A JP S52138072A
Authority
JP
Japan
Prior art keywords
single crystal
silicon single
manufacture
fluoride
converting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5432376A
Other languages
Japanese (ja)
Inventor
Shoji Tsuruta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TOYO SHIRIKON KK
Mitsubishi Materials Silicon Corp
Mitsubishi Metal Corp
Original Assignee
TOYO SHIRIKON KK
Toyo Silicon Co Ltd
Mitsubishi Metal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TOYO SHIRIKON KK, Toyo Silicon Co Ltd, Mitsubishi Metal Corp filed Critical TOYO SHIRIKON KK
Priority to JP5432376A priority Critical patent/JPS52138072A/en
Publication of JPS52138072A publication Critical patent/JPS52138072A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To decrease the dislocation rate, by inducing gaseous F2 and/or fluoride to the growth atmosphere of silicon single crystal, converting Si or silicon oxide to non-condensing material and preventing the generation of floating particles.
COPYRIGHT: (C)1977,JPO&Japio
JP5432376A 1976-05-14 1976-05-14 Manufacture of silicon single crystal Pending JPS52138072A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5432376A JPS52138072A (en) 1976-05-14 1976-05-14 Manufacture of silicon single crystal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5432376A JPS52138072A (en) 1976-05-14 1976-05-14 Manufacture of silicon single crystal

Publications (1)

Publication Number Publication Date
JPS52138072A true JPS52138072A (en) 1977-11-17

Family

ID=12967367

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5432376A Pending JPS52138072A (en) 1976-05-14 1976-05-14 Manufacture of silicon single crystal

Country Status (1)

Country Link
JP (1) JPS52138072A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008013325A1 (en) * 2008-03-10 2009-09-24 Siltronic Ag Single crystal silicon wafer and process for its production

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008013325A1 (en) * 2008-03-10 2009-09-24 Siltronic Ag Single crystal silicon wafer and process for its production
US7868325B2 (en) 2008-03-10 2011-01-11 Siltronic Ag Semiconductor wafer of single crystalline silicon and process for its manufacture
KR101028443B1 (en) 2008-03-10 2011-04-14 실트로닉 아게 Semiconductor wafer of single crystalline silicon and process for its manufacture
DE102008013325B4 (en) * 2008-03-10 2011-12-01 Siltronic Ag Single crystal silicon wafer and process for its production

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