JPS5240082A - Resistor element and process for production of same - Google Patents
Resistor element and process for production of sameInfo
- Publication number
- JPS5240082A JPS5240082A JP11583075A JP11583075A JPS5240082A JP S5240082 A JPS5240082 A JP S5240082A JP 11583075 A JP11583075 A JP 11583075A JP 11583075 A JP11583075 A JP 11583075A JP S5240082 A JPS5240082 A JP S5240082A
- Authority
- JP
- Japan
- Prior art keywords
- resistor element
- production
- same
- silicon oxide
- theredy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To form a resistor element by converting polycrystalline sillicon to silicon oxide and further adding impurity atoms to the silicon oxide, theredy facilitating design and achieving higher density of integration.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11583075A JPS5240082A (en) | 1975-09-25 | 1975-09-25 | Resistor element and process for production of same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11583075A JPS5240082A (en) | 1975-09-25 | 1975-09-25 | Resistor element and process for production of same |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1438483A Division JPS58130555A (en) | 1983-01-31 | 1983-01-31 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5240082A true JPS5240082A (en) | 1977-03-28 |
Family
ID=14672164
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11583075A Pending JPS5240082A (en) | 1975-09-25 | 1975-09-25 | Resistor element and process for production of same |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5240082A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5516444A (en) * | 1978-07-24 | 1980-02-05 | Hitachi Ltd | Producing method of semiconductor thin film resistance |
JPS5682608A (en) * | 1979-12-08 | 1981-07-06 | Toyo Tire & Rubber Co Ltd | Radial tyre for passenger car |
JPS6196756A (en) * | 1984-10-17 | 1986-05-15 | Nec Corp | Semiconductor device and manufacture thereof |
JPS6196755A (en) * | 1984-10-17 | 1986-05-15 | Nec Corp | Semiconductor device and manufacture thereof |
JPS61120456A (en) * | 1984-11-16 | 1986-06-07 | Nec Corp | Semiconductor device |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4933434A (en) * | 1972-07-20 | 1974-03-27 | ||
JPS4984588A (en) * | 1972-12-19 | 1974-08-14 | ||
JPS5138884A (en) * | 1974-09-27 | 1976-03-31 | Tokyo Shibaura Electric Co | HANDOTAISOCHISEIZOHOHO |
-
1975
- 1975-09-25 JP JP11583075A patent/JPS5240082A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4933434A (en) * | 1972-07-20 | 1974-03-27 | ||
JPS4984588A (en) * | 1972-12-19 | 1974-08-14 | ||
JPS5138884A (en) * | 1974-09-27 | 1976-03-31 | Tokyo Shibaura Electric Co | HANDOTAISOCHISEIZOHOHO |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5516444A (en) * | 1978-07-24 | 1980-02-05 | Hitachi Ltd | Producing method of semiconductor thin film resistance |
JPS5682608A (en) * | 1979-12-08 | 1981-07-06 | Toyo Tire & Rubber Co Ltd | Radial tyre for passenger car |
JPS5847364B2 (en) * | 1979-12-08 | 1983-10-21 | 東洋ゴム工業株式会社 | Radial tires for passenger cars |
JPS6196756A (en) * | 1984-10-17 | 1986-05-15 | Nec Corp | Semiconductor device and manufacture thereof |
JPS6196755A (en) * | 1984-10-17 | 1986-05-15 | Nec Corp | Semiconductor device and manufacture thereof |
JPS61120456A (en) * | 1984-11-16 | 1986-06-07 | Nec Corp | Semiconductor device |
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