JPS5213787A - Production method of mos-type integrated circuit - Google Patents

Production method of mos-type integrated circuit

Info

Publication number
JPS5213787A
JPS5213787A JP50089732A JP8973275A JPS5213787A JP S5213787 A JPS5213787 A JP S5213787A JP 50089732 A JP50089732 A JP 50089732A JP 8973275 A JP8973275 A JP 8973275A JP S5213787 A JPS5213787 A JP S5213787A
Authority
JP
Japan
Prior art keywords
mos
integrated circuit
production method
type integrated
type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50089732A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5733857B2 (enrdf_load_stackoverflow
Inventor
Masashi Omori
Isao Okura
Kazuhiro Shimotori
Kenji Anami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP50089732A priority Critical patent/JPS5213787A/ja
Publication of JPS5213787A publication Critical patent/JPS5213787A/ja
Publication of JPS5733857B2 publication Critical patent/JPS5733857B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
JP50089732A 1975-07-23 1975-07-23 Production method of mos-type integrated circuit Granted JPS5213787A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50089732A JPS5213787A (en) 1975-07-23 1975-07-23 Production method of mos-type integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50089732A JPS5213787A (en) 1975-07-23 1975-07-23 Production method of mos-type integrated circuit

Publications (2)

Publication Number Publication Date
JPS5213787A true JPS5213787A (en) 1977-02-02
JPS5733857B2 JPS5733857B2 (enrdf_load_stackoverflow) 1982-07-20

Family

ID=13978924

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50089732A Granted JPS5213787A (en) 1975-07-23 1975-07-23 Production method of mos-type integrated circuit

Country Status (1)

Country Link
JP (1) JPS5213787A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4670234A (en) * 1984-01-25 1987-06-02 Heinz Holter Process for stripping nitrogen oxides and sulphur oxides as well as optionally other noxious elements of flue gas from combustion plants

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5084185A (enrdf_load_stackoverflow) * 1973-11-27 1975-07-07
JPS5197388A (en) * 1975-02-24 1976-08-26 Sohogata mos denkaikokatoranjisutanoseizohoho

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5084185A (enrdf_load_stackoverflow) * 1973-11-27 1975-07-07
JPS5197388A (en) * 1975-02-24 1976-08-26 Sohogata mos denkaikokatoranjisutanoseizohoho

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4670234A (en) * 1984-01-25 1987-06-02 Heinz Holter Process for stripping nitrogen oxides and sulphur oxides as well as optionally other noxious elements of flue gas from combustion plants

Also Published As

Publication number Publication date
JPS5733857B2 (enrdf_load_stackoverflow) 1982-07-20

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