JPS52133284A - Probing device equipped with automatic inspection function - Google Patents

Probing device equipped with automatic inspection function

Info

Publication number
JPS52133284A
JPS52133284A JP5050676A JP5050676A JPS52133284A JP S52133284 A JPS52133284 A JP S52133284A JP 5050676 A JP5050676 A JP 5050676A JP 5050676 A JP5050676 A JP 5050676A JP S52133284 A JPS52133284 A JP S52133284A
Authority
JP
Japan
Prior art keywords
device equipped
automatic inspection
inspection function
probing device
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5050676A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5625981B2 (enrdf_load_stackoverflow
Inventor
Seiichiro Murashima
Yoshiaki Matsuoka
Chiaki Adachi
Yoshiaki Kojima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp
Priority to JP5050676A priority Critical patent/JPS52133284A/ja
Publication of JPS52133284A publication Critical patent/JPS52133284A/ja
Publication of JPS5625981B2 publication Critical patent/JPS5625981B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
JP5050676A 1976-05-01 1976-05-01 Probing device equipped with automatic inspection function Granted JPS52133284A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5050676A JPS52133284A (en) 1976-05-01 1976-05-01 Probing device equipped with automatic inspection function

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5050676A JPS52133284A (en) 1976-05-01 1976-05-01 Probing device equipped with automatic inspection function

Publications (2)

Publication Number Publication Date
JPS52133284A true JPS52133284A (en) 1977-11-08
JPS5625981B2 JPS5625981B2 (enrdf_load_stackoverflow) 1981-06-16

Family

ID=12860834

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5050676A Granted JPS52133284A (en) 1976-05-01 1976-05-01 Probing device equipped with automatic inspection function

Country Status (1)

Country Link
JP (1) JPS52133284A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5797444A (en) * 1980-12-10 1982-06-17 Toshiba Corp Ultrasonic flaw detector
JPS6433655U (enrdf_load_stackoverflow) * 1987-08-17 1989-03-02
JPH05215382A (ja) * 1992-02-04 1993-08-24 Yazaki Corp 空気調和システム

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS583422A (ja) * 1981-06-30 1983-01-10 Toshiba Corp サイリスタバルブの光トリガ信号発生器
JPS58142625A (ja) * 1982-02-18 1983-08-24 Matsushita Electric Works Ltd 光ファイバー形ソリッドステートリレー
KR102582276B1 (ko) * 2019-12-19 2023-09-25 주식회사 원익아이피에스 기판처리장치

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5097388A (enrdf_load_stackoverflow) * 1973-12-24 1975-08-02

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5097388A (enrdf_load_stackoverflow) * 1973-12-24 1975-08-02

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5797444A (en) * 1980-12-10 1982-06-17 Toshiba Corp Ultrasonic flaw detector
JPS6433655U (enrdf_load_stackoverflow) * 1987-08-17 1989-03-02
JPH05215382A (ja) * 1992-02-04 1993-08-24 Yazaki Corp 空気調和システム

Also Published As

Publication number Publication date
JPS5625981B2 (enrdf_load_stackoverflow) 1981-06-16

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