JPS5625981B2 - - Google Patents
Info
- Publication number
- JPS5625981B2 JPS5625981B2 JP5050676A JP5050676A JPS5625981B2 JP S5625981 B2 JPS5625981 B2 JP S5625981B2 JP 5050676 A JP5050676 A JP 5050676A JP 5050676 A JP5050676 A JP 5050676A JP S5625981 B2 JPS5625981 B2 JP S5625981B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5050676A JPS52133284A (en) | 1976-05-01 | 1976-05-01 | Probing device equipped with automatic inspection function |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5050676A JPS52133284A (en) | 1976-05-01 | 1976-05-01 | Probing device equipped with automatic inspection function |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52133284A JPS52133284A (en) | 1977-11-08 |
JPS5625981B2 true JPS5625981B2 (enrdf_load_stackoverflow) | 1981-06-16 |
Family
ID=12860834
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5050676A Granted JPS52133284A (en) | 1976-05-01 | 1976-05-01 | Probing device equipped with automatic inspection function |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52133284A (enrdf_load_stackoverflow) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS583422A (ja) * | 1981-06-30 | 1983-01-10 | Toshiba Corp | サイリスタバルブの光トリガ信号発生器 |
JPS58142625A (ja) * | 1982-02-18 | 1983-08-24 | Matsushita Electric Works Ltd | 光ファイバー形ソリッドステートリレー |
KR20210078679A (ko) * | 2019-12-19 | 2021-06-29 | 주식회사 원익아이피에스 | 기판처리장치 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5797444A (en) * | 1980-12-10 | 1982-06-17 | Toshiba Corp | Ultrasonic flaw detector |
JPS6433655U (enrdf_load_stackoverflow) * | 1987-08-17 | 1989-03-02 | ||
JP2691324B2 (ja) * | 1992-02-04 | 1997-12-17 | 矢崎総業株式会社 | 空気調和システム |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5326991B2 (enrdf_load_stackoverflow) * | 1973-12-24 | 1978-08-05 |
-
1976
- 1976-05-01 JP JP5050676A patent/JPS52133284A/ja active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS583422A (ja) * | 1981-06-30 | 1983-01-10 | Toshiba Corp | サイリスタバルブの光トリガ信号発生器 |
JPS58142625A (ja) * | 1982-02-18 | 1983-08-24 | Matsushita Electric Works Ltd | 光ファイバー形ソリッドステートリレー |
KR20210078679A (ko) * | 2019-12-19 | 2021-06-29 | 주식회사 원익아이피에스 | 기판처리장치 |
Also Published As
Publication number | Publication date |
---|---|
JPS52133284A (en) | 1977-11-08 |