JPS52133042A - Method of etching films of indium oxide - Google Patents

Method of etching films of indium oxide

Info

Publication number
JPS52133042A
JPS52133042A JP5060576A JP5060576A JPS52133042A JP S52133042 A JPS52133042 A JP S52133042A JP 5060576 A JP5060576 A JP 5060576A JP 5060576 A JP5060576 A JP 5060576A JP S52133042 A JPS52133042 A JP S52133042A
Authority
JP
Japan
Prior art keywords
indium oxide
etching films
etching
films
indium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5060576A
Other languages
English (en)
Japanese (ja)
Other versions
JPS551985B2 (enrdf_load_html_response
Inventor
Hiroshi Kishishita
Harumi Kosasa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP5060576A priority Critical patent/JPS52133042A/ja
Publication of JPS52133042A publication Critical patent/JPS52133042A/ja
Publication of JPS551985B2 publication Critical patent/JPS551985B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Manufacturing Of Electric Cables (AREA)
  • ing And Chemical Polishing (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
JP5060576A 1976-04-30 1976-04-30 Method of etching films of indium oxide Granted JPS52133042A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5060576A JPS52133042A (en) 1976-04-30 1976-04-30 Method of etching films of indium oxide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5060576A JPS52133042A (en) 1976-04-30 1976-04-30 Method of etching films of indium oxide

Publications (2)

Publication Number Publication Date
JPS52133042A true JPS52133042A (en) 1977-11-08
JPS551985B2 JPS551985B2 (enrdf_load_html_response) 1980-01-17

Family

ID=12863587

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5060576A Granted JPS52133042A (en) 1976-04-30 1976-04-30 Method of etching films of indium oxide

Country Status (1)

Country Link
JP (1) JPS52133042A (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPS551985B2 (enrdf_load_html_response) 1980-01-17

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