JPS5330798A - Method of plasmaaetching of transparent conductive film - Google Patents
Method of plasmaaetching of transparent conductive filmInfo
- Publication number
- JPS5330798A JPS5330798A JP10467276A JP10467276A JPS5330798A JP S5330798 A JPS5330798 A JP S5330798A JP 10467276 A JP10467276 A JP 10467276A JP 10467276 A JP10467276 A JP 10467276A JP S5330798 A JPS5330798 A JP S5330798A
- Authority
- JP
- Japan
- Prior art keywords
- plasmaaetching
- conductive film
- transparent conductive
- transparent
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51104672A JPS5826603B2 (en) | 1976-09-01 | 1976-09-01 | Plasma etching method for transparent conductive film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51104672A JPS5826603B2 (en) | 1976-09-01 | 1976-09-01 | Plasma etching method for transparent conductive film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5330798A true JPS5330798A (en) | 1978-03-23 |
JPS5826603B2 JPS5826603B2 (en) | 1983-06-03 |
Family
ID=14386952
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51104672A Expired JPS5826603B2 (en) | 1976-09-01 | 1976-09-01 | Plasma etching method for transparent conductive film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5826603B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01259184A (en) * | 1987-10-01 | 1989-10-16 | Gunze Ltd | Method and device for etching transparent conductive film |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2233286A (en) * | 1989-06-01 | 1991-01-09 | P Maguire | Pattern processing on tin oxide films |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5141015A (en) * | 1974-10-03 | 1976-04-06 | Tokyo Ohka Kogyo Co Ltd | Sankasuzumaku no etsuchinguhoho |
-
1976
- 1976-09-01 JP JP51104672A patent/JPS5826603B2/en not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5141015A (en) * | 1974-10-03 | 1976-04-06 | Tokyo Ohka Kogyo Co Ltd | Sankasuzumaku no etsuchinguhoho |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01259184A (en) * | 1987-10-01 | 1989-10-16 | Gunze Ltd | Method and device for etching transparent conductive film |
Also Published As
Publication number | Publication date |
---|---|
JPS5826603B2 (en) | 1983-06-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS52132688A (en) | Method of forming flat thin film | |
JPS5684809A (en) | Method of forming transparent conductive film | |
JPS5682504A (en) | Method of forming transparent conductive film | |
JPS52151639A (en) | Plating method of film | |
JPS55133703A (en) | Method of producing transparent conductive film | |
JPS569906A (en) | Method of manufacturing transparent conductive film | |
JPS5610450A (en) | Transparent conductive film | |
JPS5654702A (en) | Method of manufactuping transparent conductive film | |
JPS5686408A (en) | Method of forming transparent conductive film | |
JPS5330798A (en) | Method of plasmaaetching of transparent conductive film | |
JPS569905A (en) | Method of manufacturing transparent conductive film | |
JPS53703A (en) | Method of make transparent original for photooengraving | |
JPS531858A (en) | Method of forming thin film circuit | |
JPS5510704A (en) | Transparent conductive film and method of manufacturing same | |
JPS5595207A (en) | Conductive transparent film | |
JPS5378066A (en) | Method of producing conductive thin film line | |
JPS5744910A (en) | Method of forming transparent conductive film | |
JPS56126210A (en) | Method of forming transparent conductive film | |
JPS5314636A (en) | Method of forming metallized film | |
JPS52119677A (en) | Method of manufacturing electroconductive films | |
JPS5569904A (en) | Method of manufacturing transparent conductive film | |
JPS5290096A (en) | Transparent conductive film and method of manufacture thereof | |
JPS52120929A (en) | Method of etching transparent conductive films | |
JPS52137665A (en) | Method of producing thin film circuit | |
JPS5331768A (en) | Method of producing transparent film |