JPS5378066A - Method of producing conductive thin film line - Google Patents
Method of producing conductive thin film lineInfo
- Publication number
- JPS5378066A JPS5378066A JP15334776A JP15334776A JPS5378066A JP S5378066 A JPS5378066 A JP S5378066A JP 15334776 A JP15334776 A JP 15334776A JP 15334776 A JP15334776 A JP 15334776A JP S5378066 A JPS5378066 A JP S5378066A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- conductive thin
- film line
- producing conductive
- producing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15334776A JPS5378066A (en) | 1976-12-22 | 1976-12-22 | Method of producing conductive thin film line |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15334776A JPS5378066A (en) | 1976-12-22 | 1976-12-22 | Method of producing conductive thin film line |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5378066A true JPS5378066A (en) | 1978-07-11 |
JPS5730319B2 JPS5730319B2 (en) | 1982-06-28 |
Family
ID=15560476
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15334776A Granted JPS5378066A (en) | 1976-12-22 | 1976-12-22 | Method of producing conductive thin film line |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5378066A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57198696A (en) * | 1981-06-01 | 1982-12-06 | Shimada Rika Kogyo Kk | Method of producing thin film circuit |
JPS61212044A (en) * | 1985-03-18 | 1986-09-20 | Tdk Corp | Formation of copper electrode on oxide ceramic |
CN108183069A (en) * | 2017-12-28 | 2018-06-19 | 苏州工业园区纳米产业技术研究院有限公司 | Cu wet etching methods |
-
1976
- 1976-12-22 JP JP15334776A patent/JPS5378066A/en active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57198696A (en) * | 1981-06-01 | 1982-12-06 | Shimada Rika Kogyo Kk | Method of producing thin film circuit |
JPS61212044A (en) * | 1985-03-18 | 1986-09-20 | Tdk Corp | Formation of copper electrode on oxide ceramic |
CN108183069A (en) * | 2017-12-28 | 2018-06-19 | 苏州工业园区纳米产业技术研究院有限公司 | Cu wet etching methods |
Also Published As
Publication number | Publication date |
---|---|
JPS5730319B2 (en) | 1982-06-28 |
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