JPS5378066A - Method of producing conductive thin film line - Google Patents

Method of producing conductive thin film line

Info

Publication number
JPS5378066A
JPS5378066A JP15334776A JP15334776A JPS5378066A JP S5378066 A JPS5378066 A JP S5378066A JP 15334776 A JP15334776 A JP 15334776A JP 15334776 A JP15334776 A JP 15334776A JP S5378066 A JPS5378066 A JP S5378066A
Authority
JP
Japan
Prior art keywords
thin film
conductive thin
film line
producing conductive
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15334776A
Other languages
Japanese (ja)
Other versions
JPS5730319B2 (en
Inventor
Shiyouzou Takeno
Masakazu Iwagami
Shiyuuzou Wada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Marcon Electronics Co Ltd
Toshiba Corp
Original Assignee
Marcon Electronics Co Ltd
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Marcon Electronics Co Ltd, Tokyo Shibaura Electric Co Ltd filed Critical Marcon Electronics Co Ltd
Priority to JP15334776A priority Critical patent/JPS5378066A/en
Publication of JPS5378066A publication Critical patent/JPS5378066A/en
Publication of JPS5730319B2 publication Critical patent/JPS5730319B2/ja
Granted legal-status Critical Current

Links

JP15334776A 1976-12-22 1976-12-22 Method of producing conductive thin film line Granted JPS5378066A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15334776A JPS5378066A (en) 1976-12-22 1976-12-22 Method of producing conductive thin film line

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15334776A JPS5378066A (en) 1976-12-22 1976-12-22 Method of producing conductive thin film line

Publications (2)

Publication Number Publication Date
JPS5378066A true JPS5378066A (en) 1978-07-11
JPS5730319B2 JPS5730319B2 (en) 1982-06-28

Family

ID=15560476

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15334776A Granted JPS5378066A (en) 1976-12-22 1976-12-22 Method of producing conductive thin film line

Country Status (1)

Country Link
JP (1) JPS5378066A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57198696A (en) * 1981-06-01 1982-12-06 Shimada Rika Kogyo Kk Method of producing thin film circuit
JPS61212044A (en) * 1985-03-18 1986-09-20 Tdk Corp Formation of copper electrode on oxide ceramic
CN108183069A (en) * 2017-12-28 2018-06-19 苏州工业园区纳米产业技术研究院有限公司 Cu wet etching methods

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57198696A (en) * 1981-06-01 1982-12-06 Shimada Rika Kogyo Kk Method of producing thin film circuit
JPS61212044A (en) * 1985-03-18 1986-09-20 Tdk Corp Formation of copper electrode on oxide ceramic
CN108183069A (en) * 2017-12-28 2018-06-19 苏州工业园区纳米产业技术研究院有限公司 Cu wet etching methods

Also Published As

Publication number Publication date
JPS5730319B2 (en) 1982-06-28

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