JPS52132783A - Electron ray exposure unit - Google Patents

Electron ray exposure unit

Info

Publication number
JPS52132783A
JPS52132783A JP4954176A JP4954176A JPS52132783A JP S52132783 A JPS52132783 A JP S52132783A JP 4954176 A JP4954176 A JP 4954176A JP 4954176 A JP4954176 A JP 4954176A JP S52132783 A JPS52132783 A JP S52132783A
Authority
JP
Japan
Prior art keywords
electron ray
exposure unit
ray exposure
electron
providing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4954176A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5537100B2 (enExample
Inventor
Sakae Miyauchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP4954176A priority Critical patent/JPS52132783A/ja
Publication of JPS52132783A publication Critical patent/JPS52132783A/ja
Publication of JPS5537100B2 publication Critical patent/JPS5537100B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP4954176A 1976-04-30 1976-04-30 Electron ray exposure unit Granted JPS52132783A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4954176A JPS52132783A (en) 1976-04-30 1976-04-30 Electron ray exposure unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4954176A JPS52132783A (en) 1976-04-30 1976-04-30 Electron ray exposure unit

Publications (2)

Publication Number Publication Date
JPS52132783A true JPS52132783A (en) 1977-11-07
JPS5537100B2 JPS5537100B2 (enExample) 1980-09-25

Family

ID=12834036

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4954176A Granted JPS52132783A (en) 1976-04-30 1976-04-30 Electron ray exposure unit

Country Status (1)

Country Link
JP (1) JPS52132783A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5357761A (en) * 1976-11-04 1978-05-25 Fujitsu Ltd Electron beam exposure apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5357761A (en) * 1976-11-04 1978-05-25 Fujitsu Ltd Electron beam exposure apparatus

Also Published As

Publication number Publication date
JPS5537100B2 (enExample) 1980-09-25

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