JPS52129275A - Impurity diffusion method - Google Patents
Impurity diffusion methodInfo
- Publication number
- JPS52129275A JPS52129275A JP4596676A JP4596676A JPS52129275A JP S52129275 A JPS52129275 A JP S52129275A JP 4596676 A JP4596676 A JP 4596676A JP 4596676 A JP4596676 A JP 4596676A JP S52129275 A JPS52129275 A JP S52129275A
- Authority
- JP
- Japan
- Prior art keywords
- impurity diffusion
- diffusion method
- concentration diffusion
- high concentration
- low concentration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Bipolar Transistors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4596676A JPS5850411B2 (ja) | 1976-04-21 | 1976-04-21 | 不純物拡散法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4596676A JPS5850411B2 (ja) | 1976-04-21 | 1976-04-21 | 不純物拡散法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52129275A true JPS52129275A (en) | 1977-10-29 |
JPS5850411B2 JPS5850411B2 (ja) | 1983-11-10 |
Family
ID=12733968
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4596676A Expired JPS5850411B2 (ja) | 1976-04-21 | 1976-04-21 | 不純物拡散法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5850411B2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS558011A (en) * | 1978-06-30 | 1980-01-21 | Fujitsu Ltd | Semi-conductor device manufacturing method |
JPS5660055A (en) * | 1979-10-20 | 1981-05-23 | Nec Home Electronics Ltd | Manufacture of semiconductor device |
-
1976
- 1976-04-21 JP JP4596676A patent/JPS5850411B2/ja not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS558011A (en) * | 1978-06-30 | 1980-01-21 | Fujitsu Ltd | Semi-conductor device manufacturing method |
JPS5660055A (en) * | 1979-10-20 | 1981-05-23 | Nec Home Electronics Ltd | Manufacture of semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPS5850411B2 (ja) | 1983-11-10 |
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