JPS5212559A - Exposure of electronic microscope - Google Patents

Exposure of electronic microscope

Info

Publication number
JPS5212559A
JPS5212559A JP50088276A JP8827675A JPS5212559A JP S5212559 A JPS5212559 A JP S5212559A JP 50088276 A JP50088276 A JP 50088276A JP 8827675 A JP8827675 A JP 8827675A JP S5212559 A JPS5212559 A JP S5212559A
Authority
JP
Japan
Prior art keywords
exposure
electronic microscope
contamination
cdd
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50088276A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5537062B2 (enExample
Inventor
Tsutomu Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50088276A priority Critical patent/JPS5212559A/ja
Publication of JPS5212559A publication Critical patent/JPS5212559A/ja
Publication of JPS5537062B2 publication Critical patent/JPS5537062B2/ja
Granted legal-status Critical Current

Links

JP50088276A 1975-07-21 1975-07-21 Exposure of electronic microscope Granted JPS5212559A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50088276A JPS5212559A (en) 1975-07-21 1975-07-21 Exposure of electronic microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50088276A JPS5212559A (en) 1975-07-21 1975-07-21 Exposure of electronic microscope

Publications (2)

Publication Number Publication Date
JPS5212559A true JPS5212559A (en) 1977-01-31
JPS5537062B2 JPS5537062B2 (enExample) 1980-09-25

Family

ID=13938370

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50088276A Granted JPS5212559A (en) 1975-07-21 1975-07-21 Exposure of electronic microscope

Country Status (1)

Country Link
JP (1) JPS5212559A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6421852A (en) * 1987-07-17 1989-01-25 Fujitsu Ltd Electron beam exposure system

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63131974U (enExample) * 1987-02-19 1988-08-29

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4862957U (enExample) * 1971-11-18 1973-08-10
JPS4951146U (enExample) * 1972-08-11 1974-05-07

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4862957U (enExample) * 1971-11-18 1973-08-10
JPS4951146U (enExample) * 1972-08-11 1974-05-07

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6421852A (en) * 1987-07-17 1989-01-25 Fujitsu Ltd Electron beam exposure system

Also Published As

Publication number Publication date
JPS5537062B2 (enExample) 1980-09-25

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