JPS52117574A - Electronic beam exposure unit - Google Patents

Electronic beam exposure unit

Info

Publication number
JPS52117574A
JPS52117574A JP3418176A JP3418176A JPS52117574A JP S52117574 A JPS52117574 A JP S52117574A JP 3418176 A JP3418176 A JP 3418176A JP 3418176 A JP3418176 A JP 3418176A JP S52117574 A JPS52117574 A JP S52117574A
Authority
JP
Japan
Prior art keywords
exposure unit
beam exposure
electronic beam
amplitude
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3418176A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5435073B2 (OSRAM
Inventor
Tadahiro Takigawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3418176A priority Critical patent/JPS52117574A/ja
Publication of JPS52117574A publication Critical patent/JPS52117574A/ja
Publication of JPS5435073B2 publication Critical patent/JPS5435073B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP3418176A 1976-03-30 1976-03-30 Electronic beam exposure unit Granted JPS52117574A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3418176A JPS52117574A (en) 1976-03-30 1976-03-30 Electronic beam exposure unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3418176A JPS52117574A (en) 1976-03-30 1976-03-30 Electronic beam exposure unit

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP4909579A Division JPS551187A (en) 1979-04-23 1979-04-23 Electron beam exposure apparatus
JP4909479A Division JPS551186A (en) 1979-04-23 1979-04-23 Electron beam exposure apparatus

Publications (2)

Publication Number Publication Date
JPS52117574A true JPS52117574A (en) 1977-10-03
JPS5435073B2 JPS5435073B2 (OSRAM) 1979-10-31

Family

ID=12407023

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3418176A Granted JPS52117574A (en) 1976-03-30 1976-03-30 Electronic beam exposure unit

Country Status (1)

Country Link
JP (1) JPS52117574A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52147977A (en) * 1976-04-02 1977-12-08 Jeol Ltd Electronic lens unit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52147977A (en) * 1976-04-02 1977-12-08 Jeol Ltd Electronic lens unit

Also Published As

Publication number Publication date
JPS5435073B2 (OSRAM) 1979-10-31

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