JPS5435073B2 - - Google Patents
Info
- Publication number
- JPS5435073B2 JPS5435073B2 JP3418176A JP3418176A JPS5435073B2 JP S5435073 B2 JPS5435073 B2 JP S5435073B2 JP 3418176 A JP3418176 A JP 3418176A JP 3418176 A JP3418176 A JP 3418176A JP S5435073 B2 JPS5435073 B2 JP S5435073B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3418176A JPS52117574A (en) | 1976-03-30 | 1976-03-30 | Electronic beam exposure unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3418176A JPS52117574A (en) | 1976-03-30 | 1976-03-30 | Electronic beam exposure unit |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4909579A Division JPS551187A (en) | 1979-04-23 | 1979-04-23 | Electron beam exposure apparatus |
| JP4909479A Division JPS551186A (en) | 1979-04-23 | 1979-04-23 | Electron beam exposure apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52117574A JPS52117574A (en) | 1977-10-03 |
| JPS5435073B2 true JPS5435073B2 (OSRAM) | 1979-10-31 |
Family
ID=12407023
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3418176A Granted JPS52117574A (en) | 1976-03-30 | 1976-03-30 | Electronic beam exposure unit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52117574A (OSRAM) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52147977A (en) * | 1976-04-02 | 1977-12-08 | Jeol Ltd | Electronic lens unit |
-
1976
- 1976-03-30 JP JP3418176A patent/JPS52117574A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52117574A (en) | 1977-10-03 |