Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co LtdfiledCriticalToshiba Corp
Priority to JP2732476ApriorityCriticalpatent/JPS52110572A/en
Publication of JPS52110572ApublicationCriticalpatent/JPS52110572A/en
PURPOSE: To obtain the production method of semiconductor device by which the terminal outlet pad in semiconductor element can be made extremely smaller enabling to provide greater number of terminals and reliability can be improproved.
COPYRIGHT: (C)1977,JPO&Japio
JP2732476A1976-03-131976-03-13Production of semiconductor
PendingJPS52110572A
(en)