JPS52106672A - Device for liquid phase epitaxial growth - Google Patents
Device for liquid phase epitaxial growthInfo
- Publication number
- JPS52106672A JPS52106672A JP2394076A JP2394076A JPS52106672A JP S52106672 A JPS52106672 A JP S52106672A JP 2394076 A JP2394076 A JP 2394076A JP 2394076 A JP2394076 A JP 2394076A JP S52106672 A JPS52106672 A JP S52106672A
- Authority
- JP
- Japan
- Prior art keywords
- liquid phase
- epitaxial growth
- phase epitaxial
- epi
- fired
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2394076A JPS52106672A (en) | 1976-03-05 | 1976-03-05 | Device for liquid phase epitaxial growth |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2394076A JPS52106672A (en) | 1976-03-05 | 1976-03-05 | Device for liquid phase epitaxial growth |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52106672A true JPS52106672A (en) | 1977-09-07 |
JPS5431340B2 JPS5431340B2 (ja) | 1979-10-06 |
Family
ID=12124518
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2394076A Granted JPS52106672A (en) | 1976-03-05 | 1976-03-05 | Device for liquid phase epitaxial growth |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52106672A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5366881A (en) * | 1976-11-26 | 1978-06-14 | Mitsubishi Electric Corp | Epitaxial growing apparatus in liquid phase |
-
1976
- 1976-03-05 JP JP2394076A patent/JPS52106672A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5366881A (en) * | 1976-11-26 | 1978-06-14 | Mitsubishi Electric Corp | Epitaxial growing apparatus in liquid phase |
Also Published As
Publication number | Publication date |
---|---|
JPS5431340B2 (ja) | 1979-10-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS52108744A (en) | Shift register | |
JPS52130210A (en) | Subscriber condition display control system | |
JPS52106672A (en) | Device for liquid phase epitaxial growth | |
JPS52136919A (en) | Long-acting insecticide | |
JPS51125719A (en) | A method for preparing a liquid medicine for internal use | |
JPS52135264A (en) | Liquid phase epitaxial growth method | |
JPS5228476A (en) | Liquid phase growth apparatus | |
JPS52117071A (en) | Self-cleaning type preparation of semiconductor | |
JPS51139774A (en) | Liquid phase growing device | |
JPS52106671A (en) | Device of liquid phase eptaxial growth | |
JPS5211860A (en) | Liquid phase epitaxial device | |
JPS52153923A (en) | Preparation of 2-amino-4-alkoxyphenols | |
JPS5391573A (en) | Molecular-beam epitaxial growth equipment | |
JPS51141956A (en) | Method for detecting a product of vaccum slide fastener | |
JPS5229477A (en) | Multi-layer epitaxial growth method at liquid phase | |
JPS5247884A (en) | Method for preparing stabilized polyolefin | |
JPS523724A (en) | Rain-water gutter | |
JPS51138385A (en) | Method for liquid phase epitaxial growth | |
JPS51124735A (en) | A control apparatus for the fuel amount control apparatus | |
JPS548970A (en) | Liquid phase epitaxial growth device | |
JPS5218097A (en) | Sprinkler | |
JPS52131004A (en) | Repairment for anti-corrosion plate of turbie blade | |
JPS5227269A (en) | Liquid phase epytaxial growth | |
JPS524127A (en) | Display equipment | |
JPS5258461A (en) | Liquid phase epitaxial device |