JPS52102680A - Precision position adjusting apparatus - Google Patents
Precision position adjusting apparatusInfo
- Publication number
- JPS52102680A JPS52102680A JP1900676A JP1900676A JPS52102680A JP S52102680 A JPS52102680 A JP S52102680A JP 1900676 A JP1900676 A JP 1900676A JP 1900676 A JP1900676 A JP 1900676A JP S52102680 A JPS52102680 A JP S52102680A
- Authority
- JP
- Japan
- Prior art keywords
- position adjusting
- adjusting apparatus
- precision position
- face
- movement table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Control Of Position Or Direction (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE: To make precise determination of position easy by fixing a coarse movement table on which one body is set on the base at coarse adjusting and a fine movement table on which another body is set at fine adjusting when the two bodies which are set face to face are adjusted.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1900676A JPS52102680A (en) | 1976-02-25 | 1976-02-25 | Precision position adjusting apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1900676A JPS52102680A (en) | 1976-02-25 | 1976-02-25 | Precision position adjusting apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52102680A true JPS52102680A (en) | 1977-08-29 |
JPS5337709B2 JPS5337709B2 (en) | 1978-10-11 |
Family
ID=11987420
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1900676A Granted JPS52102680A (en) | 1976-02-25 | 1976-02-25 | Precision position adjusting apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52102680A (en) |
-
1976
- 1976-02-25 JP JP1900676A patent/JPS52102680A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5337709B2 (en) | 1978-10-11 |
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