JPS52100255A - Apparatus for scanning of target by charged particle beam - Google Patents

Apparatus for scanning of target by charged particle beam

Info

Publication number
JPS52100255A
JPS52100255A JP1665277A JP1665277A JPS52100255A JP S52100255 A JPS52100255 A JP S52100255A JP 1665277 A JP1665277 A JP 1665277A JP 1665277 A JP1665277 A JP 1665277A JP S52100255 A JPS52100255 A JP S52100255A
Authority
JP
Japan
Prior art keywords
scanning
target
charged particle
particle beam
charged
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1665277A
Other languages
English (en)
Japanese (ja)
Inventor
Azamu Gi
Peroodan Kuroodo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CGR MEV SA
Original Assignee
CGR MEV SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CGR MEV SA filed Critical CGR MEV SA
Publication of JPS52100255A publication Critical patent/JPS52100255A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/08—Deviation, concentration or focusing of the beam by electric or magnetic means
    • G21K1/093—Deviation, concentration or focusing of the beam by electric or magnetic means by magnetic means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1472—Deflecting along given lines
    • H01J37/1474—Scanning means
    • H01J37/1475—Scanning means magnetic

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Radiation-Therapy Devices (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
JP1665277A 1976-02-17 1977-02-17 Apparatus for scanning of target by charged particle beam Pending JPS52100255A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7604346A FR2341922A1 (fr) 1976-02-17 1976-02-17 Perfectionnement a un dispositif de balayage d'une cible par un faisceau de particules chargees

Publications (1)

Publication Number Publication Date
JPS52100255A true JPS52100255A (en) 1977-08-23

Family

ID=9169224

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1665277A Pending JPS52100255A (en) 1976-02-17 1977-02-17 Apparatus for scanning of target by charged particle beam

Country Status (6)

Country Link
US (1) US4110623A (enExample)
JP (1) JPS52100255A (enExample)
CA (1) CA1073561A (enExample)
DE (1) DE2706792A1 (enExample)
FR (1) FR2341922A1 (enExample)
GB (1) GB1570314A (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55121259A (en) * 1979-03-14 1980-09-18 Hitachi Ltd Elelctron microscope
US4465934A (en) * 1981-01-23 1984-08-14 Veeco Instruments Inc. Parallel charged particle beam exposure system
DE3152735A1 (de) * 1981-02-23 1983-02-24 Oleg Aleksandrovic Gusev Einrichtung zur bestrahlung von objekten mit elektronen
JPS60112236A (ja) * 1983-11-21 1985-06-18 Hitachi Ltd パルスビ−ム発生装置
DE3705294A1 (de) * 1987-02-19 1988-09-01 Kernforschungsz Karlsruhe Magnetisches ablenksystem fuer geladene teilchen
US4767930A (en) * 1987-03-31 1988-08-30 Siemens Medical Laboratories, Inc. Method and apparatus for enlarging a charged particle beam
GB2216714B (en) * 1988-03-11 1992-10-14 Ulvac Corp Ion implanter system
JPH078300B2 (ja) * 1988-06-21 1995-02-01 三菱電機株式会社 荷電粒子ビームの照射装置
US4922196A (en) * 1988-09-02 1990-05-01 Amray, Inc. Beam-blanking apparatus for stroboscopic electron beam instruments
US5521388A (en) * 1995-06-07 1996-05-28 Raychem Corporation Selective crosslink scanning system
JP4158931B2 (ja) * 2005-04-13 2008-10-01 三菱電機株式会社 粒子線治療装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2602751A (en) * 1950-08-17 1952-07-08 High Voltage Engineering Corp Method for sterilizing substances or materials such as food and drugs
US2816231A (en) * 1953-09-29 1957-12-10 High Voltage Engineering Corp Method and apparatus for imparting a scanning movement to a beam of charged particles
US2858442A (en) * 1954-03-18 1958-10-28 High Voltage Engineering Corp Apparatus for increasing the uniformity of dose distribution produced by electron irradiation
US3371206A (en) * 1964-02-04 1968-02-27 Jeol Ltd Electron beam apparatus having compensating means for triangular beam distortion

Also Published As

Publication number Publication date
GB1570314A (en) 1980-06-25
FR2341922A1 (fr) 1977-09-16
CA1073561A (en) 1980-03-11
FR2341922B1 (enExample) 1982-07-02
DE2706792A1 (de) 1977-08-18
US4110623A (en) 1978-08-29

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