FR2341922A1 - Perfectionnement a un dispositif de balayage d'une cible par un faisceau de particules chargees - Google Patents

Perfectionnement a un dispositif de balayage d'une cible par un faisceau de particules chargees

Info

Publication number
FR2341922A1
FR2341922A1 FR7604346A FR7604346A FR2341922A1 FR 2341922 A1 FR2341922 A1 FR 2341922A1 FR 7604346 A FR7604346 A FR 7604346A FR 7604346 A FR7604346 A FR 7604346A FR 2341922 A1 FR2341922 A1 FR 2341922A1
Authority
FR
France
Prior art keywords
improvement
scanning device
charged particle
particle beam
target scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7604346A
Other languages
English (en)
Other versions
FR2341922B1 (fr
Inventor
Guy Azam
Azam Et Claude Perraudin Guy
Claude Perraudin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CGR MEV SA
Original Assignee
CGR MEV SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CGR MEV SA filed Critical CGR MEV SA
Priority to FR7604346A priority Critical patent/FR2341922A1/fr
Priority to GB6138/77A priority patent/GB1570314A/en
Priority to US05/768,907 priority patent/US4110623A/en
Priority to CA271,881A priority patent/CA1073561A/fr
Priority to DE19772706792 priority patent/DE2706792A1/de
Priority to JP1665277A priority patent/JPS52100255A/ja
Publication of FR2341922A1 publication Critical patent/FR2341922A1/fr
Application granted granted Critical
Publication of FR2341922B1 publication Critical patent/FR2341922B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/08—Deviation, concentration or focusing of the beam by electric or magnetic means
    • G21K1/093—Deviation, concentration or focusing of the beam by electric or magnetic means by magnetic means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1472—Deflecting along given lines
    • H01J37/1474—Scanning means
    • H01J37/1475—Scanning means magnetic

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Radiation-Therapy Devices (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
FR7604346A 1976-02-17 1976-02-17 Perfectionnement a un dispositif de balayage d'une cible par un faisceau de particules chargees Granted FR2341922A1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR7604346A FR2341922A1 (fr) 1976-02-17 1976-02-17 Perfectionnement a un dispositif de balayage d'une cible par un faisceau de particules chargees
GB6138/77A GB1570314A (en) 1976-02-17 1977-02-14 Device for scanning a target with a beam of charged particles
US05/768,907 US4110623A (en) 1976-02-17 1977-02-15 Device for scanning a target with a beam of charged particles
CA271,881A CA1073561A (fr) 1976-02-17 1977-02-16 Dispositif de balayage de cible avec un faisceau de particules chargees
DE19772706792 DE2706792A1 (de) 1976-02-17 1977-02-17 Einrichtung zum abtasten eines ziels mit einem strahl von geladenen teilchen
JP1665277A JPS52100255A (en) 1976-02-17 1977-02-17 Apparatus for scanning of target by charged particle beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7604346A FR2341922A1 (fr) 1976-02-17 1976-02-17 Perfectionnement a un dispositif de balayage d'une cible par un faisceau de particules chargees

Publications (2)

Publication Number Publication Date
FR2341922A1 true FR2341922A1 (fr) 1977-09-16
FR2341922B1 FR2341922B1 (fr) 1982-07-02

Family

ID=9169224

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7604346A Granted FR2341922A1 (fr) 1976-02-17 1976-02-17 Perfectionnement a un dispositif de balayage d'une cible par un faisceau de particules chargees

Country Status (6)

Country Link
US (1) US4110623A (fr)
JP (1) JPS52100255A (fr)
CA (1) CA1073561A (fr)
DE (1) DE2706792A1 (fr)
FR (1) FR2341922A1 (fr)
GB (1) GB1570314A (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3152735A1 (de) * 1981-02-23 1983-02-24 Oleg Aleksandrovic Gusev Einrichtung zur bestrahlung von objekten mit elektronen
WO1988006394A1 (fr) * 1987-02-19 1988-08-25 Kernforschungszentrum Karlsruhe Gmbh Systeme de deflexion magnetique pour particules chargees
DE3805123A1 (de) * 1987-03-31 1988-10-13 Siemens Ag Verfahren zur bestrahlung eines grossflaechigen feldes mit einem strahl aus geladenen teilchen und vorrichtung zur durchfuehrung eines solchen verfahrens
FR2634383A1 (fr) * 1988-06-21 1990-01-26 Mitsubishi Electric Corp Appareil d'irradiation par faisceau ionique
WO1996041363A1 (fr) * 1995-06-07 1996-12-19 Raychem Corporation Systeme de balayage pour une reticulation selective

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55121259A (en) * 1979-03-14 1980-09-18 Hitachi Ltd Elelctron microscope
US4465934A (en) * 1981-01-23 1984-08-14 Veeco Instruments Inc. Parallel charged particle beam exposure system
JPS60112236A (ja) * 1983-11-21 1985-06-18 Hitachi Ltd パルスビ−ム発生装置
GB2216714B (en) * 1988-03-11 1992-10-14 Ulvac Corp Ion implanter system
US4922196A (en) * 1988-09-02 1990-05-01 Amray, Inc. Beam-blanking apparatus for stroboscopic electron beam instruments
JP4158931B2 (ja) * 2005-04-13 2008-10-01 三菱電機株式会社 粒子線治療装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2602751A (en) * 1950-08-17 1952-07-08 High Voltage Engineering Corp Method for sterilizing substances or materials such as food and drugs
US2816231A (en) * 1953-09-29 1957-12-10 High Voltage Engineering Corp Method and apparatus for imparting a scanning movement to a beam of charged particles
US2858442A (en) * 1954-03-18 1958-10-28 High Voltage Engineering Corp Apparatus for increasing the uniformity of dose distribution produced by electron irradiation
US3371206A (en) * 1964-02-04 1968-02-27 Jeol Ltd Electron beam apparatus having compensating means for triangular beam distortion

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3152735A1 (de) * 1981-02-23 1983-02-24 Oleg Aleksandrovic Gusev Einrichtung zur bestrahlung von objekten mit elektronen
WO1988006394A1 (fr) * 1987-02-19 1988-08-25 Kernforschungszentrum Karlsruhe Gmbh Systeme de deflexion magnetique pour particules chargees
US4902993A (en) * 1987-02-19 1990-02-20 Kernforschungszentrum Karlsruhe Gmbh Magnetic deflection system for charged particles
DE3805123A1 (de) * 1987-03-31 1988-10-13 Siemens Ag Verfahren zur bestrahlung eines grossflaechigen feldes mit einem strahl aus geladenen teilchen und vorrichtung zur durchfuehrung eines solchen verfahrens
FR2634383A1 (fr) * 1988-06-21 1990-01-26 Mitsubishi Electric Corp Appareil d'irradiation par faisceau ionique
WO1996041363A1 (fr) * 1995-06-07 1996-12-19 Raychem Corporation Systeme de balayage pour une reticulation selective

Also Published As

Publication number Publication date
FR2341922B1 (fr) 1982-07-02
JPS52100255A (en) 1977-08-23
US4110623A (en) 1978-08-29
CA1073561A (fr) 1980-03-11
GB1570314A (en) 1980-06-25
DE2706792A1 (de) 1977-08-18

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Legal Events

Date Code Title Description
ST Notification of lapse