JPS5149191B1 - - Google Patents
Info
- Publication number
- JPS5149191B1 JPS5149191B1 JP44043687A JP4368769A JPS5149191B1 JP S5149191 B1 JPS5149191 B1 JP S5149191B1 JP 44043687 A JP44043687 A JP 44043687A JP 4368769 A JP4368769 A JP 4368769A JP S5149191 B1 JPS5149191 B1 JP S5149191B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19681769520 DE1769520A1 (de) | 1968-06-05 | 1968-06-05 | Verfahren zum epitaktischen Abscheiden von kristallinem Material aus der Gasphase,insbesondere fuer Halbleiterzwecke |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5149191B1 true JPS5149191B1 (enrdf_load_stackoverflow) | 1976-12-24 |
Family
ID=5700164
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP44043687A Pending JPS5149191B1 (enrdf_load_stackoverflow) | 1968-06-05 | 1969-06-05 |
Country Status (8)
| Country | Link |
|---|---|
| JP (1) | JPS5149191B1 (enrdf_load_stackoverflow) |
| AT (1) | AT288811B (enrdf_load_stackoverflow) |
| CH (1) | CH521163A (enrdf_load_stackoverflow) |
| DE (1) | DE1769520A1 (enrdf_load_stackoverflow) |
| FR (1) | FR1597032A (enrdf_load_stackoverflow) |
| GB (1) | GB1260233A (enrdf_load_stackoverflow) |
| NL (1) | NL6906275A (enrdf_load_stackoverflow) |
| SE (1) | SE356905B (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012222156A (ja) * | 2011-04-08 | 2012-11-12 | Hitachi Kokusai Electric Inc | 基板処理装置、及び、搬送装置 |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4096821A (en) * | 1976-12-13 | 1978-06-27 | Westinghouse Electric Corp. | System for fabricating thin-film electronic components |
| DE2722545C2 (de) * | 1977-05-18 | 1984-03-08 | Kurt Dr.-Ing. 7802 Merzhausen Heber | Diffusionsofen zur Behandlung von Halbleitersubstraten |
| DE2800574A1 (de) * | 1978-01-07 | 1979-07-12 | Stanley Electric Co Ltd | Medizinisches pruefgeraet zur untersuchung von ohren |
| DE2830589C2 (de) * | 1978-07-12 | 1985-04-18 | Ibm Deutschland Gmbh, 7000 Stuttgart | Durchlaufofen zum Prozessieren von Halbleiterplättchen |
| DE2849240C2 (de) * | 1978-11-13 | 1983-01-13 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | CVD-Beschichtungsvorrichtung für Kleinteile und ihre Verwendung |
| FR2498813A1 (fr) * | 1981-01-27 | 1982-07-30 | Instruments Sa | Installation de traitement de materiaux pour la production de semi-conducteurs |
| DE3427057A1 (de) * | 1984-07-23 | 1986-01-23 | Standard Elektrik Lorenz Ag, 7000 Stuttgart | Anlage zum herstellen von halbleiter-schichtstrukturen durch epitaktisches wachstum |
| JPS6169116A (ja) * | 1984-09-13 | 1986-04-09 | Toshiba Ceramics Co Ltd | シリコンウエハ−の連続ｃｖｄコ−テイング用サセプター |
| GB2196650A (en) * | 1986-10-27 | 1988-05-05 | Prutec Ltd | Cadmium sulphide solar cells |
| DE3907610A1 (de) * | 1989-03-09 | 1990-09-13 | Telefunken Electronic Gmbh | Epitaxieverfahren |
| JP2999751B2 (ja) | 1997-06-27 | 2000-01-17 | 三星電子株式会社 | シリカ膜の製造装置及びその製造方法 |
-
1968
- 1968-06-05 DE DE19681769520 patent/DE1769520A1/de active Pending
- 1968-12-23 FR FR1597032D patent/FR1597032A/fr not_active Expired
-
1969
- 1969-04-23 NL NL6906275A patent/NL6906275A/xx unknown
- 1969-06-03 AT AT527669A patent/AT288811B/de not_active IP Right Cessation
- 1969-06-03 CH CH839069A patent/CH521163A/de not_active IP Right Cessation
- 1969-06-04 GB GB2816169A patent/GB1260233A/en not_active Expired
- 1969-06-05 JP JP44043687A patent/JPS5149191B1/ja active Pending
- 1969-06-05 SE SE800469A patent/SE356905B/xx unknown
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012222156A (ja) * | 2011-04-08 | 2012-11-12 | Hitachi Kokusai Electric Inc | 基板処理装置、及び、搬送装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| SE356905B (enrdf_load_stackoverflow) | 1973-06-12 |
| CH521163A (de) | 1972-04-15 |
| AT288811B (de) | 1971-03-25 |
| FR1597032A (enrdf_load_stackoverflow) | 1970-06-22 |
| NL6906275A (enrdf_load_stackoverflow) | 1969-12-09 |
| GB1260233A (en) | 1972-01-12 |
| DE1769520A1 (de) | 1972-03-02 |