JPS5144497B1 - - Google Patents
Info
- Publication number
- JPS5144497B1 JPS5144497B1 JP46035956A JP3595671A JPS5144497B1 JP S5144497 B1 JPS5144497 B1 JP S5144497B1 JP 46035956 A JP46035956 A JP 46035956A JP 3595671 A JP3595671 A JP 3595671A JP S5144497 B1 JPS5144497 B1 JP S5144497B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B19/00—Liquid-phase epitaxial-layer growth
- C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
- C30B19/066—Injection or centrifugal force system
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/006—Apparatus
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/107—Melt
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US4085470A | 1970-05-27 | 1970-05-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5144497B1 true JPS5144497B1 (ja) | 1976-11-29 |
Family
ID=21913338
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP46035956A Pending JPS5144497B1 (ja) | 1970-05-27 | 1971-05-27 |
Country Status (9)
Country | Link |
---|---|
US (1) | US3713883A (ja) |
JP (1) | JPS5144497B1 (ja) |
BE (1) | BE767665A (ja) |
CA (1) | CA964968A (ja) |
DE (1) | DE2126487C3 (ja) |
FR (1) | FR2093789A5 (ja) |
GB (1) | GB1348528A (ja) |
NL (1) | NL7107319A (ja) |
SE (1) | SE375460B (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2319481C3 (de) * | 1973-04-17 | 1978-09-07 | Beckman Instruments Gmbh, 8000 Muenchen | Verfahren zum Einbau einer Fremdsubstanz in ein Halbleiter-Grundmaterial, insbesondere zur Dotierung oder Legierung von Halbleiterkörpern und Ultrazentrifuge zur Durchführung des Verfahrens |
DE2445146C3 (de) * | 1974-09-20 | 1979-03-08 | Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V., 3400 Goettingen | Verfahren und Vorrichtung zur Ausbildung epitaktischer Schichten |
US3963536A (en) * | 1974-11-18 | 1976-06-15 | Rca Corporation | Method of making electroluminescent semiconductor devices |
US4561486A (en) * | 1981-04-30 | 1985-12-31 | Hoxan Corporation | Method for fabricating polycrystalline silicon wafer |
WO1990012905A1 (en) * | 1989-04-26 | 1990-11-01 | Australian Nuclear Science & Technology Organisation | Liquid phase epitaxy |
DE4401626A1 (de) * | 1994-01-20 | 1995-07-27 | Max Planck Gesellschaft | Verfahren und Vorrichtung zur Herstellung kristalliner Schichten |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3097112A (en) * | 1960-01-12 | 1963-07-09 | Gen Electric | Method and apparatus for making cathodes |
US3033159A (en) * | 1960-10-27 | 1962-05-08 | Edward D O'brien | Centrifugal coating apparatus |
US3212929A (en) * | 1962-03-22 | 1965-10-19 | Ibm | Method of forming a glass film on an object |
DE1251441B (ja) * | 1962-06-20 | |||
US3429295A (en) * | 1963-09-17 | 1969-02-25 | Nuclear Materials & Equipment | Apparatus for producing vapor coated particles |
-
1970
- 1970-05-27 US US00040854A patent/US3713883A/en not_active Expired - Lifetime
-
1971
- 1971-01-14 CA CA102,767A patent/CA964968A/en not_active Expired
- 1971-05-19 SE SE7106532A patent/SE375460B/xx unknown
- 1971-05-25 GB GB1698971A patent/GB1348528A/en not_active Expired
- 1971-05-26 BE BE767665A patent/BE767665A/xx unknown
- 1971-05-26 FR FR7119155A patent/FR2093789A5/fr not_active Expired
- 1971-05-27 NL NL7107319A patent/NL7107319A/xx unknown
- 1971-05-27 DE DE2126487A patent/DE2126487C3/de not_active Expired
- 1971-05-27 JP JP46035956A patent/JPS5144497B1/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
CA964968A (en) | 1975-03-25 |
DE2126487C3 (de) | 1974-01-24 |
DE2126487A1 (de) | 1972-12-07 |
GB1348528A (en) | 1974-03-20 |
SE375460B (ja) | 1975-04-21 |
NL7107319A (ja) | 1971-11-30 |
US3713883A (en) | 1973-01-30 |
DE2126487B2 (de) | 1973-06-20 |
FR2093789A5 (ja) | 1972-01-28 |
BE767665A (fr) | 1971-10-18 |