JPS513878A - - Google Patents
Info
- Publication number
- JPS513878A JPS513878A JP7434674A JP7434674A JPS513878A JP S513878 A JPS513878 A JP S513878A JP 7434674 A JP7434674 A JP 7434674A JP 7434674 A JP7434674 A JP 7434674A JP S513878 A JPS513878 A JP S513878A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7434674A JPS513878A (ja) | 1974-07-01 | 1974-07-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7434674A JPS513878A (ja) | 1974-07-01 | 1974-07-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS513878A true JPS513878A (ja) | 1976-01-13 |
Family
ID=13544454
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7434674A Pending JPS513878A (ja) | 1974-07-01 | 1974-07-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS513878A (ja) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5463676A (en) * | 1977-10-29 | 1979-05-22 | Oki Electric Ind Co Ltd | Production of mask for integrated circuit |
| JPS5463680A (en) * | 1977-10-29 | 1979-05-22 | Oki Electric Ind Co Ltd | Production of mask for integrated circuit |
| JPS5724942A (en) * | 1980-07-23 | 1982-02-09 | Hitachi Ltd | Original plate for step-and-repeat camera |
| JPS5783032A (en) * | 1980-11-10 | 1982-05-24 | Mitsubishi Electric Corp | Formation of photo mask for semiconductor manufacture |
| JPS584927A (ja) * | 1981-06-30 | 1983-01-12 | Nec Ic Microcomput Syst Ltd | パタ−ン作成方法 |
| JPS625242A (ja) * | 1985-06-29 | 1987-01-12 | Toshiba Corp | レチクル |
| JPS63281439A (ja) * | 1987-05-13 | 1988-11-17 | Fujitsu Ltd | 焼き付けずれチェック方法 |
-
1974
- 1974-07-01 JP JP7434674A patent/JPS513878A/ja active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5463676A (en) * | 1977-10-29 | 1979-05-22 | Oki Electric Ind Co Ltd | Production of mask for integrated circuit |
| JPS5463680A (en) * | 1977-10-29 | 1979-05-22 | Oki Electric Ind Co Ltd | Production of mask for integrated circuit |
| JPS5724942A (en) * | 1980-07-23 | 1982-02-09 | Hitachi Ltd | Original plate for step-and-repeat camera |
| JPS5783032A (en) * | 1980-11-10 | 1982-05-24 | Mitsubishi Electric Corp | Formation of photo mask for semiconductor manufacture |
| JPS584927A (ja) * | 1981-06-30 | 1983-01-12 | Nec Ic Microcomput Syst Ltd | パタ−ン作成方法 |
| JPS625242A (ja) * | 1985-06-29 | 1987-01-12 | Toshiba Corp | レチクル |
| JPS63281439A (ja) * | 1987-05-13 | 1988-11-17 | Fujitsu Ltd | 焼き付けずれチェック方法 |