JPS5135639A - - Google Patents

Info

Publication number
JPS5135639A
JPS5135639A JP49107766A JP10776674A JPS5135639A JP S5135639 A JPS5135639 A JP S5135639A JP 49107766 A JP49107766 A JP 49107766A JP 10776674 A JP10776674 A JP 10776674A JP S5135639 A JPS5135639 A JP S5135639A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP49107766A
Other languages
Japanese (ja)
Other versions
JPS5424697B2 (enExample
Inventor
Yoshiaki Okajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10776674A priority Critical patent/JPS5424697B2/ja
Publication of JPS5135639A publication Critical patent/JPS5135639A/ja
Publication of JPS5424697B2 publication Critical patent/JPS5424697B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Drying Of Semiconductors (AREA)
JP10776674A 1974-09-20 1974-09-20 Expired JPS5424697B2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10776674A JPS5424697B2 (enExample) 1974-09-20 1974-09-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10776674A JPS5424697B2 (enExample) 1974-09-20 1974-09-20

Publications (2)

Publication Number Publication Date
JPS5135639A true JPS5135639A (enExample) 1976-03-26
JPS5424697B2 JPS5424697B2 (enExample) 1979-08-23

Family

ID=14467445

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10776674A Expired JPS5424697B2 (enExample) 1974-09-20 1974-09-20

Country Status (1)

Country Link
JP (1) JPS5424697B2 (enExample)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5164433A (ja) * 1974-11-30 1976-06-03 Dainippon Printing Co Ltd Shotsukokukakohoho
JPS5334641A (en) * 1976-09-13 1978-03-31 Northern Telecom Ltd Method of and apparatus for controlling terminal point of plasma etching
JPS5448172A (en) * 1977-09-24 1979-04-16 Tokyo Ouka Kougiyou Kk Plasma reaction processor
JPS54142143A (en) * 1978-04-27 1979-11-06 Anelva Corp Dry type etching device
JPS54142144A (en) * 1978-04-27 1979-11-06 Anelva Corp Control of dry etching
JPS5591829A (en) * 1979-01-02 1980-07-11 Motorola Inc Plasma producing process controller
JPS5685129U (enExample) * 1979-11-28 1981-07-08
JPS5690976A (en) * 1979-12-21 1981-07-23 Hitachi Ltd Controlling method for dry etching
JPS5792510A (en) * 1980-11-25 1982-06-09 Oki Electric Ind Co Ltd Etching of silicon nitride film
JPS59116366U (ja) * 1983-01-28 1984-08-06 株式会社日立製作所 エレベ−タ−ガイドレ−ルの清掃装置
US4528438A (en) * 1976-09-16 1985-07-09 Northern Telecom Limited End point control in plasma etching
JPS62165935A (ja) * 1986-01-17 1987-07-22 Tokyo Electron Ltd アツシング終点検出装置
JPS6324263U (enExample) * 1987-07-14 1988-02-17
JPS6389684A (ja) * 1986-10-01 1988-04-20 Hitachi Electronics Eng Co Ltd クリ−ニング終点検出方式

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS492482A (enExample) * 1972-04-18 1974-01-10

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS492482A (enExample) * 1972-04-18 1974-01-10

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5164433A (ja) * 1974-11-30 1976-06-03 Dainippon Printing Co Ltd Shotsukokukakohoho
JPS5334641A (en) * 1976-09-13 1978-03-31 Northern Telecom Ltd Method of and apparatus for controlling terminal point of plasma etching
US4528438A (en) * 1976-09-16 1985-07-09 Northern Telecom Limited End point control in plasma etching
JPS5448172A (en) * 1977-09-24 1979-04-16 Tokyo Ouka Kougiyou Kk Plasma reaction processor
JPS54142143A (en) * 1978-04-27 1979-11-06 Anelva Corp Dry type etching device
JPS54142144A (en) * 1978-04-27 1979-11-06 Anelva Corp Control of dry etching
JPS5591829A (en) * 1979-01-02 1980-07-11 Motorola Inc Plasma producing process controller
JPS63191628U (enExample) * 1979-01-02 1988-12-09
JPS5685129U (enExample) * 1979-11-28 1981-07-08
JPS5690976A (en) * 1979-12-21 1981-07-23 Hitachi Ltd Controlling method for dry etching
JPS5792510A (en) * 1980-11-25 1982-06-09 Oki Electric Ind Co Ltd Etching of silicon nitride film
JPS59116366U (ja) * 1983-01-28 1984-08-06 株式会社日立製作所 エレベ−タ−ガイドレ−ルの清掃装置
JPS62165935A (ja) * 1986-01-17 1987-07-22 Tokyo Electron Ltd アツシング終点検出装置
JPS6389684A (ja) * 1986-10-01 1988-04-20 Hitachi Electronics Eng Co Ltd クリ−ニング終点検出方式
JPS6324263U (enExample) * 1987-07-14 1988-02-17

Also Published As

Publication number Publication date
JPS5424697B2 (enExample) 1979-08-23

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