JPS5129017B2 - - Google Patents

Info

Publication number
JPS5129017B2
JPS5129017B2 JP47124845A JP12484572A JPS5129017B2 JP S5129017 B2 JPS5129017 B2 JP S5129017B2 JP 47124845 A JP47124845 A JP 47124845A JP 12484572 A JP12484572 A JP 12484572A JP S5129017 B2 JPS5129017 B2 JP S5129017B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47124845A
Other languages
Japanese (ja)
Other versions
JPS4883828A (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4883828A publication Critical patent/JPS4883828A/ja
Publication of JPS5129017B2 publication Critical patent/JPS5129017B2/ja
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0388Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H01L23/293Organic, e.g. plastic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Electrophotography Using Other Than Carlson'S Method (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
JP47124845A 1972-01-21 1972-12-14 Expired JPS5129017B2 (cg-RX-API-DMAC7.html)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US21988172A 1972-01-21 1972-01-21

Publications (2)

Publication Number Publication Date
JPS4883828A JPS4883828A (cg-RX-API-DMAC7.html) 1973-11-08
JPS5129017B2 true JPS5129017B2 (cg-RX-API-DMAC7.html) 1976-08-23

Family

ID=22821140

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47124845A Expired JPS5129017B2 (cg-RX-API-DMAC7.html) 1972-01-21 1972-12-14

Country Status (8)

Country Link
US (1) US3794510A (cg-RX-API-DMAC7.html)
JP (1) JPS5129017B2 (cg-RX-API-DMAC7.html)
BE (1) BE794343A (cg-RX-API-DMAC7.html)
DE (1) DE2302667C3 (cg-RX-API-DMAC7.html)
FR (1) FR2168593A1 (cg-RX-API-DMAC7.html)
GB (1) GB1417726A (cg-RX-API-DMAC7.html)
IT (1) IT978291B (cg-RX-API-DMAC7.html)
SE (1) SE386210B (cg-RX-API-DMAC7.html)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3950569A (en) * 1972-05-05 1976-04-13 W. R. Grace & Co. Method for preparing coatings with solid curable compositions containing styrene-allyl alcohol copolymer based polythiols
US4018937A (en) * 1972-12-14 1977-04-19 Rca Corporation Electron beam recording comprising polymer of 1-methylvinyl methyl ketone
US4012536A (en) * 1972-12-14 1977-03-15 Rca Corporation Electron beam recording medium comprising 1-methylvinyl methyl ketone
US4061799A (en) * 1973-11-05 1977-12-06 Texas Instruments Incorporated Method of patterning styrene diene block copolymer electron beam resists
US3916035A (en) * 1973-11-05 1975-10-28 Texas Instruments Inc Epoxy-polymer electron beam resists
DE2545047C3 (de) * 1975-10-08 1978-09-21 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zur Herstellung eines Halbleiterfestwertspeichers
JPS5315153A (en) * 1976-07-27 1978-02-10 Canon Inc Hologram
CS193322B1 (en) * 1977-11-07 1979-10-31 Jaroslav Kalal Electron resisit
JPS5511217A (en) * 1978-07-10 1980-01-26 Nippon Telegr & Teleph Corp <Ntt> Pattern forming method using radiation sensitive high polymer
DE3070833D1 (en) * 1980-09-19 1985-08-08 Ibm Deutschland Structure with a silicon body that presents an aperture and method of making this structure
US4892617A (en) * 1984-08-22 1990-01-09 American Telephone & Telegraph Company, At&T Bell Laboratories Processes involving lithographic materials
JPH0234984A (ja) * 1988-04-13 1990-02-05 Mitsubishi Electric Corp プリント回路基板の製造方法

Also Published As

Publication number Publication date
IT978291B (it) 1974-09-20
SE386210B (sv) 1976-08-02
JPS4883828A (cg-RX-API-DMAC7.html) 1973-11-08
DE2302667C3 (de) 1982-01-07
DE2302667A1 (de) 1973-07-26
DE2302667B2 (de) 1981-01-22
GB1417726A (en) 1975-12-17
BE794343A (fr) 1973-07-19
FR2168593A1 (cg-RX-API-DMAC7.html) 1973-08-31
US3794510A (en) 1974-02-26

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