JPS511587B1 - - Google Patents
Info
- Publication number
- JPS511587B1 JPS511587B1 JP47033432A JP3343272A JPS511587B1 JP S511587 B1 JPS511587 B1 JP S511587B1 JP 47033432 A JP47033432 A JP 47033432A JP 3343272 A JP3343272 A JP 3343272A JP S511587 B1 JPS511587 B1 JP S511587B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/20—Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
- H01J9/233—Manufacture of photoelectric screens or charge-storage screens
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Drying Of Semiconductors (AREA)
- Optical Filters (AREA)
- ing And Chemical Polishing (AREA)
- Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13138771A | 1971-04-05 | 1971-04-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS511587B1 true JPS511587B1 (OSRAM) | 1976-01-19 |
Family
ID=22449243
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47033432A Pending JPS511587B1 (OSRAM) | 1971-04-05 | 1972-04-03 |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US3692655A (OSRAM) |
| JP (1) | JPS511587B1 (OSRAM) |
| AU (1) | AU456093B2 (OSRAM) |
| CA (1) | CA971129A (OSRAM) |
| DE (1) | DE2215711C2 (OSRAM) |
| FR (1) | FR2136067A5 (OSRAM) |
| GB (1) | GB1374502A (OSRAM) |
| IT (1) | IT949868B (OSRAM) |
| NL (1) | NL7204456A (OSRAM) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3966577A (en) * | 1973-08-27 | 1976-06-29 | Trw Inc. | Dielectrically isolated semiconductor devices |
| DE2752675A1 (de) * | 1976-12-08 | 1978-06-15 | Philips Corp | Verfahren zum rasterfoermigen ausbilden einer pyroelektrischen vidikonauftreffplatte |
| US4132586A (en) * | 1977-12-20 | 1979-01-02 | International Business Machines Corporation | Selective dry etching of substrates |
| JPS5942749B2 (ja) * | 1979-07-11 | 1984-10-17 | 株式会社東芝 | 多層膜のエツチング方法 |
| US4333793A (en) * | 1980-10-20 | 1982-06-08 | Bell Telephone Laboratories, Incorporated | High-selectivity plasma-assisted etching of resist-masked layer |
| US4421593A (en) * | 1983-04-11 | 1983-12-20 | Rca Corporation | Reverse etching of chromium |
| US5007983A (en) * | 1988-01-29 | 1991-04-16 | The United States Of America As Represented By The Administrator Of National Aeronautics And Space Administration | Etching method for photoresists or polymers |
| CN110496451A (zh) * | 2019-08-23 | 2019-11-26 | 苏州华滤节能科技有限公司 | 机油过滤器用滤芯 |
-
1971
- 1971-04-05 US US131387A patent/US3692655A/en not_active Expired - Lifetime
-
1972
- 1972-03-03 IT IT21398/72A patent/IT949868B/it active
- 1972-03-08 CA CA136,599A patent/CA971129A/en not_active Expired
- 1972-03-27 AU AU40438/72A patent/AU456093B2/en not_active Expired
- 1972-03-28 FR FR7210795A patent/FR2136067A5/fr not_active Expired
- 1972-03-29 GB GB1469472A patent/GB1374502A/en not_active Expired
- 1972-03-30 DE DE2215711A patent/DE2215711C2/de not_active Expired
- 1972-04-03 JP JP47033432A patent/JPS511587B1/ja active Pending
- 1972-04-04 NL NL7204456A patent/NL7204456A/xx not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| AU456093B2 (en) | 1974-11-22 |
| US3692655A (en) | 1972-09-19 |
| FR2136067A5 (OSRAM) | 1972-12-22 |
| DE2215711C2 (de) | 1982-06-03 |
| IT949868B (it) | 1973-06-11 |
| NL7204456A (OSRAM) | 1972-10-09 |
| CA971129A (en) | 1975-07-15 |
| AU4043872A (en) | 1973-10-04 |
| GB1374502A (en) | 1974-11-20 |
| DE2215711A1 (de) | 1973-10-25 |