JPS51145267A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS51145267A
JPS51145267A JP50069815A JP6981575A JPS51145267A JP S51145267 A JPS51145267 A JP S51145267A JP 50069815 A JP50069815 A JP 50069815A JP 6981575 A JP6981575 A JP 6981575A JP S51145267 A JPS51145267 A JP S51145267A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
film
monolithic crystal
sos
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50069815A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5739533B2 (show.php
Inventor
Kiyohiro Kawasaki
Takeshi Ishihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50069815A priority Critical patent/JPS51145267A/ja
Publication of JPS51145267A publication Critical patent/JPS51145267A/ja
Publication of JPS5739533B2 publication Critical patent/JPS5739533B2/ja
Granted legal-status Critical Current

Links

JP50069815A 1975-06-09 1975-06-09 Manufacture of semiconductor device Granted JPS51145267A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50069815A JPS51145267A (en) 1975-06-09 1975-06-09 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50069815A JPS51145267A (en) 1975-06-09 1975-06-09 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS51145267A true JPS51145267A (en) 1976-12-14
JPS5739533B2 JPS5739533B2 (show.php) 1982-08-21

Family

ID=13413622

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50069815A Granted JPS51145267A (en) 1975-06-09 1975-06-09 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS51145267A (show.php)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5752141A (en) * 1980-09-12 1982-03-27 Sharp Corp Manufacture of semiconductor element
US6730607B2 (en) * 2000-06-16 2004-05-04 Infineon Technologies Ag Method for fabricating a barrier layer
JP2006261556A (ja) * 2005-03-18 2006-09-28 Oki Electric Ind Co Ltd Ｓｏｓウェハおよびその製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5752141A (en) * 1980-09-12 1982-03-27 Sharp Corp Manufacture of semiconductor element
US6730607B2 (en) * 2000-06-16 2004-05-04 Infineon Technologies Ag Method for fabricating a barrier layer
JP2006261556A (ja) * 2005-03-18 2006-09-28 Oki Electric Ind Co Ltd Ｓｏｓウェハおよびその製造方法

Also Published As

Publication number Publication date
JPS5739533B2 (show.php) 1982-08-21

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