JPS51143380A - Semiconductor pressure converter - Google Patents

Semiconductor pressure converter

Info

Publication number
JPS51143380A
JPS51143380A JP6645075A JP6645075A JPS51143380A JP S51143380 A JPS51143380 A JP S51143380A JP 6645075 A JP6645075 A JP 6645075A JP 6645075 A JP6645075 A JP 6645075A JP S51143380 A JPS51143380 A JP S51143380A
Authority
JP
Japan
Prior art keywords
pressure converter
semiconductor pressure
gauge
sensitivity
dispersion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6645075A
Other languages
English (en)
Japanese (ja)
Other versions
JPS576270B2 (OSRAM
Inventor
Satoshi Shimada
Kazuji Yamada
Yasumasa Matsuda
Kazumichi Kimura
Michitaka Shimazoe
Yukio Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6645075A priority Critical patent/JPS51143380A/ja
Priority to US05/692,368 priority patent/US4050313A/en
Publication of JPS51143380A publication Critical patent/JPS51143380A/ja
Publication of JPS576270B2 publication Critical patent/JPS576270B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
JP6645075A 1975-06-04 1975-06-04 Semiconductor pressure converter Granted JPS51143380A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP6645075A JPS51143380A (en) 1975-06-04 1975-06-04 Semiconductor pressure converter
US05/692,368 US4050313A (en) 1975-06-04 1976-06-03 Semiconductor pressure transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6645075A JPS51143380A (en) 1975-06-04 1975-06-04 Semiconductor pressure converter

Publications (2)

Publication Number Publication Date
JPS51143380A true JPS51143380A (en) 1976-12-09
JPS576270B2 JPS576270B2 (OSRAM) 1982-02-04

Family

ID=13316108

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6645075A Granted JPS51143380A (en) 1975-06-04 1975-06-04 Semiconductor pressure converter

Country Status (1)

Country Link
JP (1) JPS51143380A (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5444883A (en) * 1977-09-16 1979-04-09 Toshiba Corp Semiconductor pressure converter
JPS54149486A (en) * 1978-05-16 1979-11-22 Toshiba Corp Pressure-sensitive element

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5444883A (en) * 1977-09-16 1979-04-09 Toshiba Corp Semiconductor pressure converter
JPS54149486A (en) * 1978-05-16 1979-11-22 Toshiba Corp Pressure-sensitive element

Also Published As

Publication number Publication date
JPS576270B2 (OSRAM) 1982-02-04

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