JPS51140778A - Spectroscopic curved crystalline structure and its manufacturing metho d - Google Patents

Spectroscopic curved crystalline structure and its manufacturing metho d

Info

Publication number
JPS51140778A
JPS51140778A JP50065685A JP6568575A JPS51140778A JP S51140778 A JPS51140778 A JP S51140778A JP 50065685 A JP50065685 A JP 50065685A JP 6568575 A JP6568575 A JP 6568575A JP S51140778 A JPS51140778 A JP S51140778A
Authority
JP
Japan
Prior art keywords
crystalline structure
spectroscopic
curved
metho
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50065685A
Other languages
English (en)
Other versions
JPS576535B2 (ja
Inventor
Yoshito Ueda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimadzu Seisakusho Ltd
Original Assignee
Shimadzu Corp
Shimadzu Seisakusho Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimadzu Seisakusho Ltd filed Critical Shimadzu Corp
Priority to JP50065685A priority Critical patent/JPS51140778A/ja
Publication of JPS51140778A publication Critical patent/JPS51140778A/ja
Publication of JPS576535B2 publication Critical patent/JPS576535B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP50065685A 1975-05-30 1975-05-30 Spectroscopic curved crystalline structure and its manufacturing metho d Granted JPS51140778A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50065685A JPS51140778A (en) 1975-05-30 1975-05-30 Spectroscopic curved crystalline structure and its manufacturing metho d

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50065685A JPS51140778A (en) 1975-05-30 1975-05-30 Spectroscopic curved crystalline structure and its manufacturing metho d

Publications (2)

Publication Number Publication Date
JPS51140778A true JPS51140778A (en) 1976-12-03
JPS576535B2 JPS576535B2 (ja) 1982-02-05

Family

ID=13294100

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50065685A Granted JPS51140778A (en) 1975-05-30 1975-05-30 Spectroscopic curved crystalline structure and its manufacturing metho d

Country Status (1)

Country Link
JP (1) JPS51140778A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01253700A (ja) * 1988-03-31 1989-10-09 Shimadzu Corp 非対称ヨハンソン型湾曲結晶及びその結晶を用いたｘ線投影露光光学系
JPH02257100A (ja) * 1989-03-29 1990-10-17 Shimadzu Corp ヨハンソン型湾曲結晶の製作方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01253700A (ja) * 1988-03-31 1989-10-09 Shimadzu Corp 非対称ヨハンソン型湾曲結晶及びその結晶を用いたｘ線投影露光光学系
JPH02257100A (ja) * 1989-03-29 1990-10-17 Shimadzu Corp ヨハンソン型湾曲結晶の製作方法

Also Published As

Publication number Publication date
JPS576535B2 (ja) 1982-02-05

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