JPS576535B2 - - Google Patents
Info
- Publication number
- JPS576535B2 JPS576535B2 JP6568575A JP6568575A JPS576535B2 JP S576535 B2 JPS576535 B2 JP S576535B2 JP 6568575 A JP6568575 A JP 6568575A JP 6568575 A JP6568575 A JP 6568575A JP S576535 B2 JPS576535 B2 JP S576535B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50065685A JPS51140778A (en) | 1975-05-30 | 1975-05-30 | Spectroscopic curved crystalline structure and its manufacturing metho d |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50065685A JPS51140778A (en) | 1975-05-30 | 1975-05-30 | Spectroscopic curved crystalline structure and its manufacturing metho d |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51140778A JPS51140778A (en) | 1976-12-03 |
| JPS576535B2 true JPS576535B2 (ja) | 1982-02-05 |
Family
ID=13294100
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50065685A Granted JPS51140778A (en) | 1975-05-30 | 1975-05-30 | Spectroscopic curved crystalline structure and its manufacturing metho d |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51140778A (ja) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01253700A (ja) * | 1988-03-31 | 1989-10-09 | Shimadzu Corp | 非対称ヨハンソン型湾曲結晶及びその結晶を用いたｘ線投影露光光学系 |
| JPH02257100A (ja) * | 1989-03-29 | 1990-10-17 | Shimadzu Corp | ヨハンソン型湾曲結晶の製作方法 |
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1975
- 1975-05-30 JP JP50065685A patent/JPS51140778A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51140778A (en) | 1976-12-03 |