JPS51135477A - Manufacturing method of semiconductor devices - Google Patents

Manufacturing method of semiconductor devices

Info

Publication number
JPS51135477A
JPS51135477A JP6033975A JP6033975A JPS51135477A JP S51135477 A JPS51135477 A JP S51135477A JP 6033975 A JP6033975 A JP 6033975A JP 6033975 A JP6033975 A JP 6033975A JP S51135477 A JPS51135477 A JP S51135477A
Authority
JP
Japan
Prior art keywords
manufacturing
semiconductor devices
gate
stabilization
sio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6033975A
Other languages
Japanese (ja)
Inventor
Tsutomu Yoshihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP6033975A priority Critical patent/JPS51135477A/en
Publication of JPS51135477A publication Critical patent/JPS51135477A/en
Pending legal-status Critical Current

Links

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  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: Stabilization of the threshold voltage of Si3N4-SiO2 double structure gate film in manufacturing Si gate MOST.
COPYRIGHT: (C)1976,JPO&Japio
JP6033975A 1975-05-20 1975-05-20 Manufacturing method of semiconductor devices Pending JPS51135477A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6033975A JPS51135477A (en) 1975-05-20 1975-05-20 Manufacturing method of semiconductor devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6033975A JPS51135477A (en) 1975-05-20 1975-05-20 Manufacturing method of semiconductor devices

Publications (1)

Publication Number Publication Date
JPS51135477A true JPS51135477A (en) 1976-11-24

Family

ID=13139294

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6033975A Pending JPS51135477A (en) 1975-05-20 1975-05-20 Manufacturing method of semiconductor devices

Country Status (1)

Country Link
JP (1) JPS51135477A (en)

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