JPS51135185A - Washing device - Google Patents

Washing device

Info

Publication number
JPS51135185A
JPS51135185A JP5925575A JP5925575A JPS51135185A JP S51135185 A JPS51135185 A JP S51135185A JP 5925575 A JP5925575 A JP 5925575A JP 5925575 A JP5925575 A JP 5925575A JP S51135185 A JPS51135185 A JP S51135185A
Authority
JP
Japan
Prior art keywords
washing device
washing
efficiently
materials
automatically perform
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5925575A
Other languages
English (en)
Japanese (ja)
Other versions
JPS561953B2 (OSRAM
Inventor
Takeo Tokiwa
Kimio Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP5925575A priority Critical patent/JPS51135185A/ja
Publication of JPS51135185A publication Critical patent/JPS51135185A/ja
Publication of JPS561953B2 publication Critical patent/JPS561953B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP5925575A 1975-05-20 1975-05-20 Washing device Granted JPS51135185A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5925575A JPS51135185A (en) 1975-05-20 1975-05-20 Washing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5925575A JPS51135185A (en) 1975-05-20 1975-05-20 Washing device

Publications (2)

Publication Number Publication Date
JPS51135185A true JPS51135185A (en) 1976-11-24
JPS561953B2 JPS561953B2 (OSRAM) 1981-01-16

Family

ID=13108078

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5925575A Granted JPS51135185A (en) 1975-05-20 1975-05-20 Washing device

Country Status (1)

Country Link
JP (1) JPS51135185A (OSRAM)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5632727A (en) * 1979-08-27 1981-04-02 Fujitsu Ltd Mask washing apparatus
JPS60110384A (ja) * 1983-11-21 1985-06-15 株式会社トクヤマ 蒸気洗浄装置
JPS60206477A (ja) * 1984-03-30 1985-10-18 株式会社デンソー 溶剤による洗浄装置
JPS614790U (ja) * 1984-06-14 1986-01-13 スピ−ドフアム株式会社 洗浄装置
JPH04305927A (ja) * 1991-02-19 1992-10-28 Shimada Phys & Chem Ind Co Ltd 洗浄装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0635529U (ja) * 1992-10-13 1994-05-13 鹿島建設株式会社 室内カプセル

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5632727A (en) * 1979-08-27 1981-04-02 Fujitsu Ltd Mask washing apparatus
JPS60110384A (ja) * 1983-11-21 1985-06-15 株式会社トクヤマ 蒸気洗浄装置
JPS60206477A (ja) * 1984-03-30 1985-10-18 株式会社デンソー 溶剤による洗浄装置
JPS614790U (ja) * 1984-06-14 1986-01-13 スピ−ドフアム株式会社 洗浄装置
JPH04305927A (ja) * 1991-02-19 1992-10-28 Shimada Phys & Chem Ind Co Ltd 洗浄装置

Also Published As

Publication number Publication date
JPS561953B2 (OSRAM) 1981-01-16

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