JPS561953B2 - - Google Patents
Info
- Publication number
- JPS561953B2 JPS561953B2 JP5925575A JP5925575A JPS561953B2 JP S561953 B2 JPS561953 B2 JP S561953B2 JP 5925575 A JP5925575 A JP 5925575A JP 5925575 A JP5925575 A JP 5925575A JP S561953 B2 JPS561953 B2 JP S561953B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5925575A JPS51135185A (en) | 1975-05-20 | 1975-05-20 | Washing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5925575A JPS51135185A (en) | 1975-05-20 | 1975-05-20 | Washing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51135185A JPS51135185A (en) | 1976-11-24 |
| JPS561953B2 true JPS561953B2 (OSRAM) | 1981-01-16 |
Family
ID=13108078
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5925575A Granted JPS51135185A (en) | 1975-05-20 | 1975-05-20 | Washing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51135185A (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0635529U (ja) * | 1992-10-13 | 1994-05-13 | 鹿島建設株式会社 | 室内カプセル |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5932057B2 (ja) * | 1979-08-27 | 1984-08-06 | 富士通株式会社 | マスク洗浄装置 |
| JPS60110384A (ja) * | 1983-11-21 | 1985-06-15 | 株式会社トクヤマ | 蒸気洗浄装置 |
| JPS60206477A (ja) * | 1984-03-30 | 1985-10-18 | 株式会社デンソー | 溶剤による洗浄装置 |
| JPS614790U (ja) * | 1984-06-14 | 1986-01-13 | スピ−ドフアム株式会社 | 洗浄装置 |
| JPH04305927A (ja) * | 1991-02-19 | 1992-10-28 | Shimada Phys & Chem Ind Co Ltd | 洗浄装置 |
-
1975
- 1975-05-20 JP JP5925575A patent/JPS51135185A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0635529U (ja) * | 1992-10-13 | 1994-05-13 | 鹿島建設株式会社 | 室内カプセル |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51135185A (en) | 1976-11-24 |