JPS51132894A - Gas sensitive body - Google Patents

Gas sensitive body

Info

Publication number
JPS51132894A
JPS51132894A JP50055972A JP5597275A JPS51132894A JP S51132894 A JPS51132894 A JP S51132894A JP 50055972 A JP50055972 A JP 50055972A JP 5597275 A JP5597275 A JP 5597275A JP S51132894 A JPS51132894 A JP S51132894A
Authority
JP
Japan
Prior art keywords
gas sensitive
sensitive body
resistnace
oxide semiconductor
high reliability
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50055972A
Other languages
Japanese (ja)
Other versions
JPS5847665B2 (en
Inventor
Noboru Ichinose
Yuji Yokomizo
Masaki Katsura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP50055972A priority Critical patent/JPS5847665B2/en
Publication of JPS51132894A publication Critical patent/JPS51132894A/en
Publication of JPS5847665B2 publication Critical patent/JPS5847665B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To obtain a high reliability gas sensitive body using on oxide semiconductor and which has a large resistnace variation rate.
COPYRIGHT: (C)1976,JPO&Japio
JP50055972A 1975-05-14 1975-05-14 gas sensing element Expired JPS5847665B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50055972A JPS5847665B2 (en) 1975-05-14 1975-05-14 gas sensing element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50055972A JPS5847665B2 (en) 1975-05-14 1975-05-14 gas sensing element

Publications (2)

Publication Number Publication Date
JPS51132894A true JPS51132894A (en) 1976-11-18
JPS5847665B2 JPS5847665B2 (en) 1983-10-24

Family

ID=13013979

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50055972A Expired JPS5847665B2 (en) 1975-05-14 1975-05-14 gas sensing element

Country Status (1)

Country Link
JP (1) JPS5847665B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1072622C (en) * 1996-05-22 2001-10-10 四川联合大学(四川大学) Gas sensitive alumina-based material and gas sensitive component

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1072622C (en) * 1996-05-22 2001-10-10 四川联合大学(四川大学) Gas sensitive alumina-based material and gas sensitive component

Also Published As

Publication number Publication date
JPS5847665B2 (en) 1983-10-24

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