JPS51110974A - - Google Patents
Info
- Publication number
- JPS51110974A JPS51110974A JP3617975A JP3617975A JPS51110974A JP S51110974 A JPS51110974 A JP S51110974A JP 3617975 A JP3617975 A JP 3617975A JP 3617975 A JP3617975 A JP 3617975A JP S51110974 A JPS51110974 A JP S51110974A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Control Of Position Or Direction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3617975A JPS568490B2 (it) | 1975-03-25 | 1975-03-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3617975A JPS568490B2 (it) | 1975-03-25 | 1975-03-25 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8579380A Division JPS568822A (en) | 1980-06-23 | 1980-06-23 | Manufacture of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51110974A true JPS51110974A (it) | 1976-09-30 |
| JPS568490B2 JPS568490B2 (it) | 1981-02-24 |
Family
ID=12462499
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3617975A Expired JPS568490B2 (it) | 1975-03-25 | 1975-03-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS568490B2 (it) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5911619A (ja) * | 1982-07-12 | 1984-01-21 | Nec Corp | 半導体装置の非接触試験方法 |
| JPS59141230A (ja) * | 1983-02-02 | 1984-08-13 | Mitsubishi Electric Corp | パタ−ン形成方法 |
| JPS6345818A (ja) * | 1986-08-13 | 1988-02-26 | Nec Corp | 半導体製造装置の位置合わせ方法 |
| JPS6351631A (ja) * | 1986-08-20 | 1988-03-04 | Sanyo Electric Co Ltd | 半導体装置の製造方法 |
| JPH01218019A (ja) * | 1988-02-26 | 1989-08-31 | Mitsubishi Electric Corp | アライメントマークが形成された半導体基板 |
-
1975
- 1975-03-25 JP JP3617975A patent/JPS568490B2/ja not_active Expired
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5911619A (ja) * | 1982-07-12 | 1984-01-21 | Nec Corp | 半導体装置の非接触試験方法 |
| JPS6330780B2 (it) * | 1982-07-12 | 1988-06-21 | Nippon Electric Co | |
| JPS59141230A (ja) * | 1983-02-02 | 1984-08-13 | Mitsubishi Electric Corp | パタ−ン形成方法 |
| JPH0544169B2 (it) * | 1983-02-02 | 1993-07-05 | Mitsubishi Electric Corp | |
| JPS6345818A (ja) * | 1986-08-13 | 1988-02-26 | Nec Corp | 半導体製造装置の位置合わせ方法 |
| JPS6351631A (ja) * | 1986-08-20 | 1988-03-04 | Sanyo Electric Co Ltd | 半導体装置の製造方法 |
| JPH01218019A (ja) * | 1988-02-26 | 1989-08-31 | Mitsubishi Electric Corp | アライメントマークが形成された半導体基板 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS568490B2 (it) | 1981-02-24 |