JPS5081070A - - Google Patents
Info
- Publication number
- JPS5081070A JPS5081070A JP12845573A JP12845573A JPS5081070A JP S5081070 A JPS5081070 A JP S5081070A JP 12845573 A JP12845573 A JP 12845573A JP 12845573 A JP12845573 A JP 12845573A JP S5081070 A JPS5081070 A JP S5081070A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12845573A JPS5081070A (ja) | 1973-11-15 | 1973-11-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12845573A JPS5081070A (ja) | 1973-11-15 | 1973-11-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5081070A true JPS5081070A (ja) | 1975-07-01 |
Family
ID=14985120
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12845573A Pending JPS5081070A (ja) | 1973-11-15 | 1973-11-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5081070A (ja) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53122369A (en) * | 1977-04-01 | 1978-10-25 | Hitachi Ltd | Automatic alignment unit for wafer |
| JPS5599737A (en) * | 1979-01-26 | 1980-07-30 | Hitachi Ltd | Work-posture adjusting device |
| JPS59103806A (ja) * | 1982-12-01 | 1984-06-15 | 日東電工株式会社 | 薄板状物品の包装装置 |
| JPS59139626A (ja) * | 1983-12-07 | 1984-08-10 | Hitachi Ltd | ウエ−ハの自動アライメント方法 |
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1973
- 1973-11-15 JP JP12845573A patent/JPS5081070A/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53122369A (en) * | 1977-04-01 | 1978-10-25 | Hitachi Ltd | Automatic alignment unit for wafer |
| JPS5599737A (en) * | 1979-01-26 | 1980-07-30 | Hitachi Ltd | Work-posture adjusting device |
| JPS59103806A (ja) * | 1982-12-01 | 1984-06-15 | 日東電工株式会社 | 薄板状物品の包装装置 |
| JPS59139626A (ja) * | 1983-12-07 | 1984-08-10 | Hitachi Ltd | ウエ−ハの自動アライメント方法 |
| JPS6240847B2 (ja) * | 1983-12-07 | 1987-08-31 | Hitachi Ltd |