JPS5074857A - - Google Patents
Info
- Publication number
- JPS5074857A JPS5074857A JP49113971A JP11397174A JPS5074857A JP S5074857 A JPS5074857 A JP S5074857A JP 49113971 A JP49113971 A JP 49113971A JP 11397174 A JP11397174 A JP 11397174A JP S5074857 A JPS5074857 A JP S5074857A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/004—Nozzle assemblies; Air knives; Air distributors; Blow boxes
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Coating Apparatus (AREA)
- Spray Control Apparatus (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Drying Of Solid Materials (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US00413753A US3849906A (en) | 1973-11-07 | 1973-11-07 | Rotary fluid applicator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5074857A true JPS5074857A (de) | 1975-06-19 |
Family
ID=23638474
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49113971A Pending JPS5074857A (de) | 1973-11-07 | 1974-10-04 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US3849906A (de) |
| JP (1) | JPS5074857A (de) |
| CA (1) | CA1035574A (de) |
| DE (1) | DE2442309A1 (de) |
| FR (1) | FR2249717B1 (de) |
| GB (1) | GB1482106A (de) |
| IT (1) | IT1022104B (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5417640A (en) * | 1977-07-08 | 1979-02-09 | Mitsubishi Electric Corp | Malfunction preventive device for integrated circuit |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4429983A (en) | 1982-03-22 | 1984-02-07 | International Business Machines Corporation | Developing apparatus for exposed photoresist coated wafers |
| DE3502648A1 (de) * | 1985-01-26 | 1986-07-31 | Carl Prof. Dr.-Ing. 5100 Aachen Kramer | Vorrichtung zur mischung eines haupt-gasstroms mit mindestens einem neben-gasstrom |
| DE3503089A1 (de) * | 1985-01-30 | 1986-07-31 | Carl Prof. Dr.-Ing. 5100 Aachen Kramer | Vorrichtung zur gleichmaessigen beaufschlagung einer planen flaeche mit einem gas |
| TWI770115B (zh) * | 2017-02-06 | 2022-07-11 | 新加坡商平面半導體公司 | 加工汙水之去除 |
| CN110603629B (zh) * | 2017-02-06 | 2022-04-29 | 平面半导体公司 | 亚纳米级光基基板清洁机构 |
| KR102126645B1 (ko) | 2017-02-06 | 2020-06-24 | 플레이너 세미컨덕터, 인크. | 나노미터 미만 수준 기판 세정 메커니즘 |
| JP2022541862A (ja) * | 2020-06-30 | 2022-09-28 | 東莞宇宙電路板設備有限公司 | 表面処理機器 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2602003A (en) * | 1946-10-30 | 1952-07-01 | Willard Storage Battery Co | Rotating apparatus for blowing loose foreign material from articles |
| US2532494A (en) * | 1946-11-23 | 1950-12-05 | Mcgraw Electric Co | Method of making paper tubes |
-
1973
- 1973-11-07 US US00413753A patent/US3849906A/en not_active Expired - Lifetime
-
1974
- 1974-09-04 DE DE2442309A patent/DE2442309A1/de active Pending
- 1974-09-19 IT IT27459/74A patent/IT1022104B/it active
- 1974-09-25 FR FR7433122A patent/FR2249717B1/fr not_active Expired
- 1974-10-04 JP JP49113971A patent/JPS5074857A/ja active Pending
- 1974-10-16 CA CA211,477A patent/CA1035574A/en not_active Expired
- 1974-10-30 GB GB47076/74A patent/GB1482106A/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5417640A (en) * | 1977-07-08 | 1979-02-09 | Mitsubishi Electric Corp | Malfunction preventive device for integrated circuit |
Also Published As
| Publication number | Publication date |
|---|---|
| DE2442309A1 (de) | 1975-05-22 |
| FR2249717B1 (de) | 1976-12-31 |
| CA1035574A (en) | 1978-08-01 |
| IT1022104B (it) | 1978-03-20 |
| FR2249717A1 (de) | 1975-05-30 |
| US3849906A (en) | 1974-11-26 |
| GB1482106A (en) | 1977-08-03 |