GB1482106A - Apparatus for applying fluid to a workpiece - Google Patents

Apparatus for applying fluid to a workpiece

Info

Publication number
GB1482106A
GB1482106A GB47076/74A GB4707674A GB1482106A GB 1482106 A GB1482106 A GB 1482106A GB 47076/74 A GB47076/74 A GB 47076/74A GB 4707674 A GB4707674 A GB 4707674A GB 1482106 A GB1482106 A GB 1482106A
Authority
GB
United Kingdom
Prior art keywords
workpiece
disk
fluid medium
suspending
slots
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB47076/74A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of GB1482106A publication Critical patent/GB1482106A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
    • F26B21/004—Nozzle assemblies; Air knives; Air distributors; Blow boxes

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Drying Of Solid Materials (AREA)
  • Coating Apparatus (AREA)
  • Spray Control Apparatus (AREA)

Abstract

1482106 Rotary spray applicator INTERNATIONAL BUSINESS MACHINES CORP 30 Oct 1974 [7 Nov 1973] 47076/74 Heading B2L [Also in Division F4] An apparatus for applying a fluid medium, e.g. a liquid to a workpiece 15 comprises a chamber 11, a rotatably mounted disk 16 on the chamber adjacent means 14 for suspending the workpiece 15, and slots 17' providing a flow of fluid medium from and obliquely to the surface 16A of the disk 16 adjacent the suspending means. The disk 16 is driven by a fluid medium fed through a nozzle 27 imping- ing on vanes formed as by spaced scallops 26 on the edge of the disk 16. Slots 17' communicate with passageways 18 which, in turn, communicate with a conduit 19 which is open to a conduit extension 23. As shown two disks 16 are provided one on each side of the suspending means 14. The suspending means 14 provides a three point control with the workpiece 15 (Fig. 2, not shown).
GB47076/74A 1973-11-07 1974-10-30 Apparatus for applying fluid to a workpiece Expired GB1482106A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00413753A US3849906A (en) 1973-11-07 1973-11-07 Rotary fluid applicator

Publications (1)

Publication Number Publication Date
GB1482106A true GB1482106A (en) 1977-08-03

Family

ID=23638474

Family Applications (1)

Application Number Title Priority Date Filing Date
GB47076/74A Expired GB1482106A (en) 1973-11-07 1974-10-30 Apparatus for applying fluid to a workpiece

Country Status (7)

Country Link
US (1) US3849906A (en)
JP (1) JPS5074857A (en)
CA (1) CA1035574A (en)
DE (1) DE2442309A1 (en)
FR (1) FR2249717B1 (en)
GB (1) GB1482106A (en)
IT (1) IT1022104B (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5417640A (en) * 1977-07-08 1979-02-09 Mitsubishi Electric Corp Malfunction preventive device for integrated circuit
US4429983A (en) 1982-03-22 1984-02-07 International Business Machines Corporation Developing apparatus for exposed photoresist coated wafers
DE3502648A1 (en) * 1985-01-26 1986-07-31 Carl Prof. Dr.-Ing. 5100 Aachen Kramer DEVICE FOR MIXING A MAIN GAS FLOW WITH AT LEAST ONE SUB GAS FLOW
DE3503089A1 (en) * 1985-01-30 1986-07-31 Carl Prof. Dr.-Ing. 5100 Aachen Kramer DEVICE FOR EVENLY APPLYING A TARGET SURFACE WITH A GAS
TWI770115B (en) * 2017-02-06 2022-07-11 新加坡商平面半導體公司 Removal of process effluents
JP6786732B2 (en) * 2017-02-06 2020-11-18 プレイナー・セミコンダクター・インコーポレイテッド Sub-nanometer level substrate cleaning mechanism
US11069521B2 (en) 2017-02-06 2021-07-20 Planar Semiconductor, Inc. Subnanometer-level light-based substrate cleaning mechanism
KR102396878B1 (en) * 2020-06-30 2022-05-12 유니버셜 서킷 보드 이큅먼트 컴퍼니 리미티드 surface treatment device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2602003A (en) * 1946-10-30 1952-07-01 Willard Storage Battery Co Rotating apparatus for blowing loose foreign material from articles
US2532494A (en) * 1946-11-23 1950-12-05 Mcgraw Electric Co Method of making paper tubes

Also Published As

Publication number Publication date
IT1022104B (en) 1978-03-20
CA1035574A (en) 1978-08-01
FR2249717A1 (en) 1975-05-30
US3849906A (en) 1974-11-26
DE2442309A1 (en) 1975-05-22
FR2249717B1 (en) 1976-12-31
JPS5074857A (en) 1975-06-19

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee