FR2249717B1 - - Google Patents

Info

Publication number
FR2249717B1
FR2249717B1 FR7433122A FR7433122A FR2249717B1 FR 2249717 B1 FR2249717 B1 FR 2249717B1 FR 7433122 A FR7433122 A FR 7433122A FR 7433122 A FR7433122 A FR 7433122A FR 2249717 B1 FR2249717 B1 FR 2249717B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7433122A
Other versions
FR2249717A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2249717A1 publication Critical patent/FR2249717A1/fr
Application granted granted Critical
Publication of FR2249717B1 publication Critical patent/FR2249717B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
    • F26B21/004—Nozzle assemblies; Air knives; Air distributors; Blow boxes

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Coating Apparatus (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Drying Of Solid Materials (AREA)
  • Spray Control Apparatus (AREA)
FR7433122A 1973-11-07 1974-09-25 Expired FR2249717B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00413753A US3849906A (en) 1973-11-07 1973-11-07 Rotary fluid applicator

Publications (2)

Publication Number Publication Date
FR2249717A1 FR2249717A1 (fr) 1975-05-30
FR2249717B1 true FR2249717B1 (fr) 1976-12-31

Family

ID=23638474

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7433122A Expired FR2249717B1 (fr) 1973-11-07 1974-09-25

Country Status (7)

Country Link
US (1) US3849906A (fr)
JP (1) JPS5074857A (fr)
CA (1) CA1035574A (fr)
DE (1) DE2442309A1 (fr)
FR (1) FR2249717B1 (fr)
GB (1) GB1482106A (fr)
IT (1) IT1022104B (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5417640A (en) * 1977-07-08 1979-02-09 Mitsubishi Electric Corp Malfunction preventive device for integrated circuit
US4429983A (en) 1982-03-22 1984-02-07 International Business Machines Corporation Developing apparatus for exposed photoresist coated wafers
DE3502648A1 (de) * 1985-01-26 1986-07-31 Carl Prof. Dr.-Ing. 5100 Aachen Kramer Vorrichtung zur mischung eines haupt-gasstroms mit mindestens einem neben-gasstrom
DE3503089A1 (de) * 1985-01-30 1986-07-31 Carl Prof. Dr.-Ing. 5100 Aachen Kramer Vorrichtung zur gleichmaessigen beaufschlagung einer planen flaeche mit einem gas
KR102126645B1 (ko) * 2017-02-06 2020-06-24 플레이너 세미컨덕터, 인크. 나노미터 미만 수준 기판 세정 메커니즘
JP6786730B2 (ja) 2017-02-06 2020-11-18 プレイナー・セミコンダクター・インコーポレイテッド サブナノメートルレベルの光ベースの基板洗浄機構
TWI770115B (zh) * 2017-02-06 2022-07-11 新加坡商平面半導體公司 加工汙水之去除
KR102396878B1 (ko) * 2020-06-30 2022-05-12 유니버셜 서킷 보드 이큅먼트 컴퍼니 리미티드 표면 처리 장치

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2602003A (en) * 1946-10-30 1952-07-01 Willard Storage Battery Co Rotating apparatus for blowing loose foreign material from articles
US2532494A (en) * 1946-11-23 1950-12-05 Mcgraw Electric Co Method of making paper tubes

Also Published As

Publication number Publication date
US3849906A (en) 1974-11-26
IT1022104B (it) 1978-03-20
CA1035574A (fr) 1978-08-01
JPS5074857A (fr) 1975-06-19
GB1482106A (en) 1977-08-03
DE2442309A1 (de) 1975-05-22
FR2249717A1 (fr) 1975-05-30

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Legal Events

Date Code Title Description
ST Notification of lapse