JPS5058982A - - Google Patents
Info
- Publication number
- JPS5058982A JPS5058982A JP49079062A JP7906274A JPS5058982A JP S5058982 A JPS5058982 A JP S5058982A JP 49079062 A JP49079062 A JP 49079062A JP 7906274 A JP7906274 A JP 7906274A JP S5058982 A JPS5058982 A JP S5058982A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H10P14/6923—
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/02—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion materials in the solid state
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- H10P14/6342—
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- H10P32/141—
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- H10P32/171—
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- H10P32/19—
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Formation Of Insulating Films (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US39890773A | 1973-09-19 | 1973-09-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5058982A true JPS5058982A (en) | 1975-05-22 |
Family
ID=23577297
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49079062A Pending JPS5058982A (en) | 1973-09-19 | 1974-07-10 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS5058982A (en) |
| DE (1) | DE2440148A1 (en) |
| FR (1) | FR2245407B3 (en) |
| GB (1) | GB1485484A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101836833A (en) * | 2010-04-09 | 2010-09-22 | 扬州维邦园林机械有限公司 | Automatic back scrubbing machine |
| JP2016506631A (en) * | 2012-12-28 | 2016-03-03 | メルク パテント ゲゼルシャフト ミット ベシュレンクテル ハフツングＭｅｒｃｋ Ｐａｔｅｎｔ Ｇｅｓｅｌｌｓｃｈａｆｔ ｍｉｔ ｂｅｓｃｈｒａｅｎｋｔｅｒ Ｈａｆｔｕｎｇ | Liquid doping media for local doping of silicon wafers |
| JP2016506630A (en) * | 2012-12-28 | 2016-03-03 | メルク パテント ゲゼルシャフト ミット ベシュレンクテル ハフツングＭｅｒｃｋ Ｐａｔｅｎｔ Ｇｅｓｅｌｌｓｃｈａｆｔ ｍｉｔ ｂｅｓｃｈｒａｅｎｋｔｅｒ Ｈａｆｔｕｎｇ | Doping medium for local doping of silicon wafers |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3375253D1 (en) * | 1982-09-23 | 1988-02-11 | Allied Corp | POLYMERIC BORON-NITROGEN DOPANT |
| US4578283A (en) * | 1982-09-23 | 1986-03-25 | Allied Corporation | Polymeric boron nitrogen dopant |
| GB2209245A (en) * | 1987-08-28 | 1989-05-04 | Gen Electric Co Plc | Method of producing a three-dimensional structure |
| US5776235A (en) * | 1996-10-04 | 1998-07-07 | Dow Corning Corporation | Thick opaque ceramic coatings |
-
1974
- 1974-06-10 FR FR7419939A patent/FR2245407B3/fr not_active Expired
- 1974-07-10 JP JP49079062A patent/JPS5058982A/ja active Pending
- 1974-08-21 DE DE2440148A patent/DE2440148A1/en not_active Withdrawn
- 1974-09-13 GB GB40047/74A patent/GB1485484A/en not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101836833A (en) * | 2010-04-09 | 2010-09-22 | 扬州维邦园林机械有限公司 | Automatic back scrubbing machine |
| JP2016506631A (en) * | 2012-12-28 | 2016-03-03 | メルク パテント ゲゼルシャフト ミット ベシュレンクテル ハフツングＭｅｒｃｋ Ｐａｔｅｎｔ Ｇｅｓｅｌｌｓｃｈａｆｔ ｍｉｔ ｂｅｓｃｈｒａｅｎｋｔｅｒ Ｈａｆｔｕｎｇ | Liquid doping media for local doping of silicon wafers |
| JP2016506630A (en) * | 2012-12-28 | 2016-03-03 | メルク パテント ゲゼルシャフト ミット ベシュレンクテル ハフツングＭｅｒｃｋ Ｐａｔｅｎｔ Ｇｅｓｅｌｌｓｃｈａｆｔ ｍｉｔ ｂｅｓｃｈｒａｅｎｋｔｅｒ Ｈａｆｔｕｎｇ | Doping medium for local doping of silicon wafers |
| US10134942B2 (en) | 2012-12-28 | 2018-11-20 | Merck Patent Gmbh | Doping media for the local doping of silicon wafers |
Also Published As
| Publication number | Publication date |
|---|---|
| GB1485484A (en) | 1977-09-14 |
| FR2245407A1 (en) | 1975-04-25 |
| DE2440148A1 (en) | 1975-03-20 |
| FR2245407B3 (en) | 1977-04-08 |