JPS5051665A - - Google Patents

Info

Publication number
JPS5051665A
JPS5051665A JP10088073A JP10088073A JPS5051665A JP S5051665 A JPS5051665 A JP S5051665A JP 10088073 A JP10088073 A JP 10088073A JP 10088073 A JP10088073 A JP 10088073A JP S5051665 A JPS5051665 A JP S5051665A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10088073A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10088073A priority Critical patent/JPS5051665A/ja
Publication of JPS5051665A publication Critical patent/JPS5051665A/ja
Pending legal-status Critical Current

Links

JP10088073A 1973-09-07 1973-09-07 Pending JPS5051665A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10088073A JPS5051665A (ja) 1973-09-07 1973-09-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10088073A JPS5051665A (ja) 1973-09-07 1973-09-07

Publications (1)

Publication Number Publication Date
JPS5051665A true JPS5051665A (ja) 1975-05-08

Family

ID=14285627

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10088073A Pending JPS5051665A (ja) 1973-09-07 1973-09-07

Country Status (1)

Country Link
JP (1) JPS5051665A (ja)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51148355A (en) * 1975-06-14 1976-12-20 Fujitsu Ltd Single crystal semiconductor base plate
JPS5226160A (en) * 1975-08-22 1977-02-26 Wacker Chemitronic Method of eliminating intrinsic crystal defect from semiconductor wafer
JPS5283175A (en) * 1975-12-31 1977-07-11 Fujitsu Ltd Production of semiconductor device
JPS5299065A (en) * 1976-02-16 1977-08-19 Mitsubishi Electric Corp Production of semiconductor device
JPS54110783A (en) * 1978-02-20 1979-08-30 Hitachi Ltd Semiconductor substrate and its manufacture
JPS5779625A (en) * 1980-11-05 1982-05-18 Sanyo Electric Co Ltd Gettering of silicon wafer
JPS5858874A (ja) * 1981-10-02 1983-04-07 Hitachi Lighting Ltd トランジスタインバ−タ
JPS6047427A (ja) * 1983-08-26 1985-03-14 Komatsu Denshi Kinzoku Kk Ｂｓｄを付与した半導体基板

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51148355A (en) * 1975-06-14 1976-12-20 Fujitsu Ltd Single crystal semiconductor base plate
JPS5226160A (en) * 1975-08-22 1977-02-26 Wacker Chemitronic Method of eliminating intrinsic crystal defect from semiconductor wafer
JPS5283175A (en) * 1975-12-31 1977-07-11 Fujitsu Ltd Production of semiconductor device
JPS59966B2 (ja) * 1975-12-31 1984-01-10 富士通株式会社 ハンドウタイソウチノセイゾウホウホウ
JPS5299065A (en) * 1976-02-16 1977-08-19 Mitsubishi Electric Corp Production of semiconductor device
JPS54110783A (en) * 1978-02-20 1979-08-30 Hitachi Ltd Semiconductor substrate and its manufacture
JPS5779625A (en) * 1980-11-05 1982-05-18 Sanyo Electric Co Ltd Gettering of silicon wafer
JPS5858874A (ja) * 1981-10-02 1983-04-07 Hitachi Lighting Ltd トランジスタインバ−タ
JPS6047427A (ja) * 1983-08-26 1985-03-14 Komatsu Denshi Kinzoku Kk Ｂｓｄを付与した半導体基板

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