JPS5051665A - - Google Patents
Info
- Publication number
- JPS5051665A JPS5051665A JP10088073A JP10088073A JPS5051665A JP S5051665 A JPS5051665 A JP S5051665A JP 10088073 A JP10088073 A JP 10088073A JP 10088073 A JP10088073 A JP 10088073A JP S5051665 A JPS5051665 A JP S5051665A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10088073A JPS5051665A (ja) | 1973-09-07 | 1973-09-07 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10088073A JPS5051665A (ja) | 1973-09-07 | 1973-09-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5051665A true JPS5051665A (ja) | 1975-05-08 |
Family
ID=14285627
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10088073A Pending JPS5051665A (ja) | 1973-09-07 | 1973-09-07 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5051665A (ja) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51148355A (en) * | 1975-06-14 | 1976-12-20 | Fujitsu Ltd | Single crystal semiconductor base plate |
JPS5226160A (en) * | 1975-08-22 | 1977-02-26 | Wacker Chemitronic | Method of eliminating intrinsic crystal defect from semiconductor wafer |
JPS5283175A (en) * | 1975-12-31 | 1977-07-11 | Fujitsu Ltd | Production of semiconductor device |
JPS5299065A (en) * | 1976-02-16 | 1977-08-19 | Mitsubishi Electric Corp | Production of semiconductor device |
JPS54110783A (en) * | 1978-02-20 | 1979-08-30 | Hitachi Ltd | Semiconductor substrate and its manufacture |
JPS5779625A (en) * | 1980-11-05 | 1982-05-18 | Sanyo Electric Co Ltd | Gettering of silicon wafer |
JPS5858874A (ja) * | 1981-10-02 | 1983-04-07 | Hitachi Lighting Ltd | トランジスタインバ−タ |
JPS6047427A (ja) * | 1983-08-26 | 1985-03-14 | Komatsu Denshi Kinzoku Kk | Bsdを付与した半導体基板 |
-
1973
- 1973-09-07 JP JP10088073A patent/JPS5051665A/ja active Pending
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51148355A (en) * | 1975-06-14 | 1976-12-20 | Fujitsu Ltd | Single crystal semiconductor base plate |
JPS5226160A (en) * | 1975-08-22 | 1977-02-26 | Wacker Chemitronic | Method of eliminating intrinsic crystal defect from semiconductor wafer |
JPS5283175A (en) * | 1975-12-31 | 1977-07-11 | Fujitsu Ltd | Production of semiconductor device |
JPS59966B2 (ja) * | 1975-12-31 | 1984-01-10 | 富士通株式会社 | ハンドウタイソウチノセイゾウホウホウ |
JPS5299065A (en) * | 1976-02-16 | 1977-08-19 | Mitsubishi Electric Corp | Production of semiconductor device |
JPS54110783A (en) * | 1978-02-20 | 1979-08-30 | Hitachi Ltd | Semiconductor substrate and its manufacture |
JPS5779625A (en) * | 1980-11-05 | 1982-05-18 | Sanyo Electric Co Ltd | Gettering of silicon wafer |
JPS5858874A (ja) * | 1981-10-02 | 1983-04-07 | Hitachi Lighting Ltd | トランジスタインバ−タ |
JPS6047427A (ja) * | 1983-08-26 | 1985-03-14 | Komatsu Denshi Kinzoku Kk | Bsdを付与した半導体基板 |