JPS5040946B1 - - Google Patents

Info

Publication number
JPS5040946B1
JPS5040946B1 JP46014433A JP1443371A JPS5040946B1 JP S5040946 B1 JPS5040946 B1 JP S5040946B1 JP 46014433 A JP46014433 A JP 46014433A JP 1443371 A JP1443371 A JP 1443371A JP S5040946 B1 JPS5040946 B1 JP S5040946B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP46014433A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5040946B1 publication Critical patent/JPS5040946B1/ja
Pending legal-status Critical Current

Links

Classifications

    • H10P72/0406—
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S134/00—Cleaning and liquid contact with solids
    • Y10S134/902—Semiconductor wafer

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Drying Of Solid Materials (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning In General (AREA)
JP46014433A 1970-03-18 1971-03-17 Pending JPS5040946B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US2066770A 1970-03-18 1970-03-18

Publications (1)

Publication Number Publication Date
JPS5040946B1 true JPS5040946B1 (ja) 1975-12-27

Family

ID=21799891

Family Applications (1)

Application Number Title Priority Date Filing Date
JP46014433A Pending JPS5040946B1 (ja) 1970-03-18 1971-03-17

Country Status (2)

Country Link
US (1) US3727620A (ja)
JP (1) JPS5040946B1 (ja)

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Also Published As

Publication number Publication date
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