JPS5026778A - - Google Patents

Info

Publication number
JPS5026778A
JPS5026778A JP49033156A JP3315674A JPS5026778A JP S5026778 A JPS5026778 A JP S5026778A JP 49033156 A JP49033156 A JP 49033156A JP 3315674 A JP3315674 A JP 3315674A JP S5026778 A JPS5026778 A JP S5026778A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP49033156A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from BE129306A external-priority patent/BE797385R/fr
Application filed filed Critical
Publication of JPS5026778A publication Critical patent/JPS5026778A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/228—Gas flow assisted PVD deposition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3471—Introduction of auxiliary energy into the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP49033156A 1973-03-27 1974-03-26 Pending JPS5026778A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
BE129306A BE797385R (fr) 1971-04-27 1973-03-27 Dispositif pour fabriquer des couches minces de substances minerales

Publications (1)

Publication Number Publication Date
JPS5026778A true JPS5026778A (fr) 1975-03-19

Family

ID=3841811

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49033156A Pending JPS5026778A (fr) 1973-03-27 1974-03-26

Country Status (7)

Country Link
US (1) US3922214A (fr)
JP (1) JPS5026778A (fr)
CH (1) CH581198A5 (fr)
DE (1) DE2412928A1 (fr)
GB (2) GB1356769A (fr)
IT (1) IT1007402B (fr)
NL (1) NL178700C (fr)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5435178A (en) * 1977-08-23 1979-03-15 Matsushita Electric Ind Co Ltd Ultrafine particle depositing apparatus
US9759171B2 (en) 2014-10-16 2017-09-12 Toyota Jidosha Kabushiki Kaisha Intake device for vehicle
US9827822B2 (en) 2015-01-23 2017-11-28 Toyota Jidosha Kabushiki Kaisha Damping force generation device for vehicle
US9903261B2 (en) 2014-12-19 2018-02-27 Toyota Jidosha Kabushiki Kaisha Vehicle cooling device
US9909633B2 (en) 2015-02-10 2018-03-06 Toyota Jidosha Kabushiki Kaisha Braking force generation device of vehicle
US10024284B2 (en) 2015-01-19 2018-07-17 Toyota Jidosha Kabushiki Kaisha Feed system of lubricating oil or fuel of vehicle
US10071699B2 (en) 2015-01-13 2018-09-11 Toyota Jidosha Kabushiki Kaisha Vehicle
US10196959B2 (en) 2014-12-26 2019-02-05 Toyota Jidosha Kabushiki Kaisha Vehicle engine exhaust system
US10260565B2 (en) 2015-01-29 2019-04-16 Toyota Jidosha Kabushiki Kaisha Wheel support device for vehicle
US10336270B2 (en) 2013-10-30 2019-07-02 Toyota Jidosha Kabushiki Kaisha Vehicle and manufacturing method thereof
US10384663B2 (en) 2014-08-29 2019-08-20 Toyota Jidosha Kabushiki Kaisha Vehicle electrification charge reducing apparatus
US10718299B2 (en) 2014-12-25 2020-07-21 Toyota Jidosha Kabushiki Kaisha Intake system of vehicle

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2324755A1 (fr) * 1975-09-19 1977-04-15 Anvar Dispositif de pulverisation cathodique de grande vitesse de depot
DE2849240C2 (de) * 1978-11-13 1983-01-13 Siemens Ag, 1000 Berlin Und 8000 Muenchen CVD-Beschichtungsvorrichtung für Kleinteile und ihre Verwendung
DE2941908C2 (de) * 1979-10-17 1986-07-03 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zum Herstellen einer eine Silizium-Schicht aufweisenden Solarzelle
FR2480552A1 (fr) * 1980-04-10 1981-10-16 Anvar Generateur de plasmaŸ
GB2085482B (en) * 1980-10-06 1985-03-06 Optical Coating Laboratory Inc Forming thin film oxide layers using reactive evaporation techniques
DE3117070A1 (de) * 1981-04-29 1982-11-18 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zum herstellen einer halbleiter-schicht-solarzelle
US4895765A (en) * 1985-09-30 1990-01-23 Union Carbide Corporation Titanium nitride and zirconium nitride coating compositions, coated articles and methods of manufacture
US4839245A (en) * 1985-09-30 1989-06-13 Union Carbide Corporation Zirconium nitride coated article and method for making same
US4929322A (en) * 1985-09-30 1990-05-29 Union Carbide Corporation Apparatus and process for arc vapor depositing a coating in an evacuated chamber
US5037522B1 (en) * 1990-07-24 1996-07-02 Vergason Technology Inc Electric arc vapor deposition device
CA2065581C (fr) 1991-04-22 2002-03-12 Andal Corp. Methode de deposition physique en phase vapeur activee par plasma, et appareil connexe
DE19635669C1 (de) * 1996-09-03 1997-07-24 Fraunhofer Ges Forschung Verfahren und Vorrichtung zur Beschichtung von Substraten mittels Gasflußsputtern
DE59702419D1 (de) * 1997-07-15 2000-11-09 Unaxis Trading Ag Truebbach Verfahren und Vorrichtung zur Sputterbeschichtung
IT1310029B1 (it) 1999-02-26 2002-02-05 Ist Naz Fisica Della Materia Vaporizzatore a microplasma pulsato.
US20120048723A1 (en) * 2010-08-24 2012-03-01 Varian Semiconductor Equipment Associates, Inc. Sputter target feed system
WO2019050483A1 (fr) * 2017-09-11 2019-03-14 Agency For Science, Technology And Research Système et procédé de pulvérisation

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3408283A (en) * 1966-09-15 1968-10-29 Kennecott Copper Corp High current duoplasmatron having an apertured anode positioned in the low pressure region
US3625848A (en) * 1968-12-26 1971-12-07 Alvin A Snaper Arc deposition process and apparatus
BE766345A (fr) * 1971-04-27 1971-09-16 Universitaire De L Etat A Mons Dispositif pour fabriquer des couches minces de substances minerales.

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5711953B2 (fr) * 1977-08-23 1982-03-08
JPS5435178A (en) * 1977-08-23 1979-03-15 Matsushita Electric Ind Co Ltd Ultrafine particle depositing apparatus
US10336270B2 (en) 2013-10-30 2019-07-02 Toyota Jidosha Kabushiki Kaisha Vehicle and manufacturing method thereof
US10384663B2 (en) 2014-08-29 2019-08-20 Toyota Jidosha Kabushiki Kaisha Vehicle electrification charge reducing apparatus
US9759171B2 (en) 2014-10-16 2017-09-12 Toyota Jidosha Kabushiki Kaisha Intake device for vehicle
US9903261B2 (en) 2014-12-19 2018-02-27 Toyota Jidosha Kabushiki Kaisha Vehicle cooling device
US10718299B2 (en) 2014-12-25 2020-07-21 Toyota Jidosha Kabushiki Kaisha Intake system of vehicle
US10196959B2 (en) 2014-12-26 2019-02-05 Toyota Jidosha Kabushiki Kaisha Vehicle engine exhaust system
US10071699B2 (en) 2015-01-13 2018-09-11 Toyota Jidosha Kabushiki Kaisha Vehicle
US10024284B2 (en) 2015-01-19 2018-07-17 Toyota Jidosha Kabushiki Kaisha Feed system of lubricating oil or fuel of vehicle
US9827822B2 (en) 2015-01-23 2017-11-28 Toyota Jidosha Kabushiki Kaisha Damping force generation device for vehicle
US10260565B2 (en) 2015-01-29 2019-04-16 Toyota Jidosha Kabushiki Kaisha Wheel support device for vehicle
US9909633B2 (en) 2015-02-10 2018-03-06 Toyota Jidosha Kabushiki Kaisha Braking force generation device of vehicle

Also Published As

Publication number Publication date
NL178700B (nl) 1985-12-02
CH581198A5 (fr) 1976-10-29
NL178700C (nl) 1986-05-01
NL7404173A (fr) 1974-10-01
DE2412928A1 (de) 1974-10-03
US3922214A (en) 1975-11-25
GB1356769A (en) 1974-06-12
GB1419239A (en) 1975-12-24
IT1007402B (it) 1976-10-30

Similar Documents

Publication Publication Date Title
AR201758A1 (fr)
AU476761B2 (fr)
AU465372B2 (fr)
AR201235Q (fr)
AR201231Q (fr)
AU474593B2 (fr)
AU474511B2 (fr)
AU474838B2 (fr)
AU471343B2 (fr)
AU465453B2 (fr)
AU465434B2 (fr)
AU450229B2 (fr)
AU476714B2 (fr)
AR201229Q (fr)
AU476696B2 (fr)
AU466283B2 (fr)
AU472848B2 (fr)
AR199451A1 (fr)
AU477823B2 (fr)
AU471461B2 (fr)
AR195948A1 (fr)
AU447540B2 (fr)
AU477824B2 (fr)
AU461342B2 (fr)
AR210729A1 (fr)