JPS5026778A - - Google Patents
Info
- Publication number
- JPS5026778A JPS5026778A JP49033156A JP3315674A JPS5026778A JP S5026778 A JPS5026778 A JP S5026778A JP 49033156 A JP49033156 A JP 49033156A JP 3315674 A JP3315674 A JP 3315674A JP S5026778 A JPS5026778 A JP S5026778A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/228—Gas flow assisted PVD deposition
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3471—Introduction of auxiliary energy into the plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Physics & Mathematics (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Analytical Chemistry (AREA)
- Plasma Technology (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
BE129306A BE797385R (fr) | 1971-04-27 | 1973-03-27 | Dispositif pour fabriquer des couches minces de substances minerales |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5026778A true JPS5026778A (fr) | 1975-03-19 |
Family
ID=3841811
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP49033156A Pending JPS5026778A (fr) | 1973-03-27 | 1974-03-26 |
Country Status (7)
Country | Link |
---|---|
US (1) | US3922214A (fr) |
JP (1) | JPS5026778A (fr) |
CH (1) | CH581198A5 (fr) |
DE (1) | DE2412928A1 (fr) |
GB (2) | GB1356769A (fr) |
IT (1) | IT1007402B (fr) |
NL (1) | NL178700C (fr) |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5435178A (en) * | 1977-08-23 | 1979-03-15 | Matsushita Electric Ind Co Ltd | Ultrafine particle depositing apparatus |
US9759171B2 (en) | 2014-10-16 | 2017-09-12 | Toyota Jidosha Kabushiki Kaisha | Intake device for vehicle |
US9827822B2 (en) | 2015-01-23 | 2017-11-28 | Toyota Jidosha Kabushiki Kaisha | Damping force generation device for vehicle |
US9903261B2 (en) | 2014-12-19 | 2018-02-27 | Toyota Jidosha Kabushiki Kaisha | Vehicle cooling device |
US9909633B2 (en) | 2015-02-10 | 2018-03-06 | Toyota Jidosha Kabushiki Kaisha | Braking force generation device of vehicle |
US10024284B2 (en) | 2015-01-19 | 2018-07-17 | Toyota Jidosha Kabushiki Kaisha | Feed system of lubricating oil or fuel of vehicle |
US10071699B2 (en) | 2015-01-13 | 2018-09-11 | Toyota Jidosha Kabushiki Kaisha | Vehicle |
US10196959B2 (en) | 2014-12-26 | 2019-02-05 | Toyota Jidosha Kabushiki Kaisha | Vehicle engine exhaust system |
US10260565B2 (en) | 2015-01-29 | 2019-04-16 | Toyota Jidosha Kabushiki Kaisha | Wheel support device for vehicle |
US10336270B2 (en) | 2013-10-30 | 2019-07-02 | Toyota Jidosha Kabushiki Kaisha | Vehicle and manufacturing method thereof |
US10384663B2 (en) | 2014-08-29 | 2019-08-20 | Toyota Jidosha Kabushiki Kaisha | Vehicle electrification charge reducing apparatus |
US10718299B2 (en) | 2014-12-25 | 2020-07-21 | Toyota Jidosha Kabushiki Kaisha | Intake system of vehicle |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2324755A1 (fr) * | 1975-09-19 | 1977-04-15 | Anvar | Dispositif de pulverisation cathodique de grande vitesse de depot |
DE2849240C2 (de) * | 1978-11-13 | 1983-01-13 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | CVD-Beschichtungsvorrichtung für Kleinteile und ihre Verwendung |
DE2941908C2 (de) * | 1979-10-17 | 1986-07-03 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Verfahren zum Herstellen einer eine Silizium-Schicht aufweisenden Solarzelle |
FR2480552A1 (fr) * | 1980-04-10 | 1981-10-16 | Anvar | Generateur de plasma |
GB2085482B (en) * | 1980-10-06 | 1985-03-06 | Optical Coating Laboratory Inc | Forming thin film oxide layers using reactive evaporation techniques |
DE3117070A1 (de) * | 1981-04-29 | 1982-11-18 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Verfahren zum herstellen einer halbleiter-schicht-solarzelle |
US4895765A (en) * | 1985-09-30 | 1990-01-23 | Union Carbide Corporation | Titanium nitride and zirconium nitride coating compositions, coated articles and methods of manufacture |
US4839245A (en) * | 1985-09-30 | 1989-06-13 | Union Carbide Corporation | Zirconium nitride coated article and method for making same |
US4929322A (en) * | 1985-09-30 | 1990-05-29 | Union Carbide Corporation | Apparatus and process for arc vapor depositing a coating in an evacuated chamber |
US5037522B1 (en) * | 1990-07-24 | 1996-07-02 | Vergason Technology Inc | Electric arc vapor deposition device |
CA2065581C (fr) | 1991-04-22 | 2002-03-12 | Andal Corp. | Methode de deposition physique en phase vapeur activee par plasma, et appareil connexe |
DE19635669C1 (de) * | 1996-09-03 | 1997-07-24 | Fraunhofer Ges Forschung | Verfahren und Vorrichtung zur Beschichtung von Substraten mittels Gasflußsputtern |
DE59702419D1 (de) * | 1997-07-15 | 2000-11-09 | Unaxis Trading Ag Truebbach | Verfahren und Vorrichtung zur Sputterbeschichtung |
IT1310029B1 (it) | 1999-02-26 | 2002-02-05 | Ist Naz Fisica Della Materia | Vaporizzatore a microplasma pulsato. |
US20120048723A1 (en) * | 2010-08-24 | 2012-03-01 | Varian Semiconductor Equipment Associates, Inc. | Sputter target feed system |
WO2019050483A1 (fr) * | 2017-09-11 | 2019-03-14 | Agency For Science, Technology And Research | Système et procédé de pulvérisation |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3408283A (en) * | 1966-09-15 | 1968-10-29 | Kennecott Copper Corp | High current duoplasmatron having an apertured anode positioned in the low pressure region |
US3625848A (en) * | 1968-12-26 | 1971-12-07 | Alvin A Snaper | Arc deposition process and apparatus |
BE766345A (fr) * | 1971-04-27 | 1971-09-16 | Universitaire De L Etat A Mons | Dispositif pour fabriquer des couches minces de substances minerales. |
-
1972
- 1972-04-27 GB GB1954472A patent/GB1356769A/en not_active Expired
-
1974
- 1974-03-13 CH CH348974A patent/CH581198A5/xx not_active IP Right Cessation
- 1974-03-18 DE DE2412928A patent/DE2412928A1/de not_active Withdrawn
- 1974-03-26 GB GB1337874A patent/GB1419239A/en not_active Expired
- 1974-03-26 JP JP49033156A patent/JPS5026778A/ja active Pending
- 1974-03-27 US US455097A patent/US3922214A/en not_active Expired - Lifetime
- 1974-03-27 NL NLAANVRAGE7404173,A patent/NL178700C/xx not_active IP Right Cessation
- 1974-04-08 IT IT20536/74A patent/IT1007402B/it active
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5711953B2 (fr) * | 1977-08-23 | 1982-03-08 | ||
JPS5435178A (en) * | 1977-08-23 | 1979-03-15 | Matsushita Electric Ind Co Ltd | Ultrafine particle depositing apparatus |
US10336270B2 (en) | 2013-10-30 | 2019-07-02 | Toyota Jidosha Kabushiki Kaisha | Vehicle and manufacturing method thereof |
US10384663B2 (en) | 2014-08-29 | 2019-08-20 | Toyota Jidosha Kabushiki Kaisha | Vehicle electrification charge reducing apparatus |
US9759171B2 (en) | 2014-10-16 | 2017-09-12 | Toyota Jidosha Kabushiki Kaisha | Intake device for vehicle |
US9903261B2 (en) | 2014-12-19 | 2018-02-27 | Toyota Jidosha Kabushiki Kaisha | Vehicle cooling device |
US10718299B2 (en) | 2014-12-25 | 2020-07-21 | Toyota Jidosha Kabushiki Kaisha | Intake system of vehicle |
US10196959B2 (en) | 2014-12-26 | 2019-02-05 | Toyota Jidosha Kabushiki Kaisha | Vehicle engine exhaust system |
US10071699B2 (en) | 2015-01-13 | 2018-09-11 | Toyota Jidosha Kabushiki Kaisha | Vehicle |
US10024284B2 (en) | 2015-01-19 | 2018-07-17 | Toyota Jidosha Kabushiki Kaisha | Feed system of lubricating oil or fuel of vehicle |
US9827822B2 (en) | 2015-01-23 | 2017-11-28 | Toyota Jidosha Kabushiki Kaisha | Damping force generation device for vehicle |
US10260565B2 (en) | 2015-01-29 | 2019-04-16 | Toyota Jidosha Kabushiki Kaisha | Wheel support device for vehicle |
US9909633B2 (en) | 2015-02-10 | 2018-03-06 | Toyota Jidosha Kabushiki Kaisha | Braking force generation device of vehicle |
Also Published As
Publication number | Publication date |
---|---|
NL178700B (nl) | 1985-12-02 |
CH581198A5 (fr) | 1976-10-29 |
NL178700C (nl) | 1986-05-01 |
NL7404173A (fr) | 1974-10-01 |
DE2412928A1 (de) | 1974-10-03 |
US3922214A (en) | 1975-11-25 |
GB1356769A (en) | 1974-06-12 |
GB1419239A (en) | 1975-12-24 |
IT1007402B (it) | 1976-10-30 |