JPS5022780A - - Google Patents

Info

Publication number
JPS5022780A
JPS5022780A JP7437373A JP7437373A JPS5022780A JP S5022780 A JPS5022780 A JP S5022780A JP 7437373 A JP7437373 A JP 7437373A JP 7437373 A JP7437373 A JP 7437373A JP S5022780 A JPS5022780 A JP S5022780A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7437373A
Other languages
Japanese (ja)
Other versions
JPS539191B2 (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7437373A priority Critical patent/JPS539191B2/ja
Publication of JPS5022780A publication Critical patent/JPS5022780A/ja
Publication of JPS539191B2 publication Critical patent/JPS539191B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP7437373A 1973-07-03 1973-07-03 Expired JPS539191B2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7437373A JPS539191B2 (enrdf_load_html_response) 1973-07-03 1973-07-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7437373A JPS539191B2 (enrdf_load_html_response) 1973-07-03 1973-07-03

Publications (2)

Publication Number Publication Date
JPS5022780A true JPS5022780A (enrdf_load_html_response) 1975-03-11
JPS539191B2 JPS539191B2 (enrdf_load_html_response) 1978-04-04

Family

ID=13545289

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7437373A Expired JPS539191B2 (enrdf_load_html_response) 1973-07-03 1973-07-03

Country Status (1)

Country Link
JP (1) JPS539191B2 (enrdf_load_html_response)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51106641A (ja) * 1975-03-17 1976-09-21 Matsushita Electric Ind Co Ltd Ionpureeteingusochi
JPS51106642A (ja) * 1975-03-17 1976-09-21 Matsushita Electric Ind Co Ltd Ionpureeteingusochi
JPS51111484A (en) * 1975-03-28 1976-10-01 Matsushita Electric Ind Co Ltd Manufacture of thin layer of vanadium dioxide
JPS5253778A (en) * 1975-10-29 1977-04-30 Yoichi Murayama Ion plating apparatus
JPS571231A (en) * 1980-06-04 1982-01-06 Res Dev Corp Of Japan Plasma chemical vapour deposition (cvd) device
JPH01317998A (ja) * 1988-06-17 1989-12-22 Toshiba Corp 保持装置
JP2022546072A (ja) * 2019-08-30 2022-11-02 ダイソン・テクノロジー・リミテッド 堆積システム

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51106641A (ja) * 1975-03-17 1976-09-21 Matsushita Electric Ind Co Ltd Ionpureeteingusochi
JPS51106642A (ja) * 1975-03-17 1976-09-21 Matsushita Electric Ind Co Ltd Ionpureeteingusochi
JPS51111484A (en) * 1975-03-28 1976-10-01 Matsushita Electric Ind Co Ltd Manufacture of thin layer of vanadium dioxide
JPS5253778A (en) * 1975-10-29 1977-04-30 Yoichi Murayama Ion plating apparatus
JPS571231A (en) * 1980-06-04 1982-01-06 Res Dev Corp Of Japan Plasma chemical vapour deposition (cvd) device
JPH01317998A (ja) * 1988-06-17 1989-12-22 Toshiba Corp 保持装置
JP2022546072A (ja) * 2019-08-30 2022-11-02 ダイソン・テクノロジー・リミテッド 堆積システム

Also Published As

Publication number Publication date
JPS539191B2 (enrdf_load_html_response) 1978-04-04

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