JPS5021503B2 - - Google Patents

Info

Publication number
JPS5021503B2
JPS5021503B2 JP47037988A JP3798872A JPS5021503B2 JP S5021503 B2 JPS5021503 B2 JP S5021503B2 JP 47037988 A JP47037988 A JP 47037988A JP 3798872 A JP3798872 A JP 3798872A JP S5021503 B2 JPS5021503 B2 JP S5021503B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47037988A
Other languages
Japanese (ja)
Other versions
JPS49390A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47037988A priority Critical patent/JPS5021503B2/ja
Publication of JPS49390A publication Critical patent/JPS49390A/ja
Publication of JPS5021503B2 publication Critical patent/JPS5021503B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Laminated Bodies (AREA)
  • Lining Or Joining Of Plastics Or The Like (AREA)
JP47037988A 1972-04-15 1972-04-15 Expired JPS5021503B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47037988A JPS5021503B2 (enrdf_load_stackoverflow) 1972-04-15 1972-04-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47037988A JPS5021503B2 (enrdf_load_stackoverflow) 1972-04-15 1972-04-15

Publications (2)

Publication Number Publication Date
JPS49390A JPS49390A (enrdf_load_stackoverflow) 1974-01-05
JPS5021503B2 true JPS5021503B2 (enrdf_load_stackoverflow) 1975-07-23

Family

ID=12512934

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47037988A Expired JPS5021503B2 (enrdf_load_stackoverflow) 1972-04-15 1972-04-15

Country Status (1)

Country Link
JP (1) JPS5021503B2 (enrdf_load_stackoverflow)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE426369B (sv) * 1978-07-28 1983-01-17 Herbert Vollmar Jonasson Forfarande och anordning for framstellning av ett armerat ror av herdplast
JPS5643719A (en) * 1979-09-18 1981-04-22 Fujitsu Ltd Vapor-phase epitaxial growth
JPS5898929A (ja) * 1981-12-09 1983-06-13 Seiko Epson Corp 原子層エツチング法
JPS6066823A (ja) * 1983-09-22 1985-04-17 Semiconductor Energy Lab Co Ltd 半導体エッチング方法
JPH0821560B2 (ja) * 1985-08-20 1996-03-04 富士通株式会社 半導体装置の製造方法
DE3650127T2 (de) * 1985-08-28 1995-05-24 Fsi Int Inc Verfahren und vorrichtung zum entfernen von schichten von substraten.
JPS6479388A (en) * 1987-09-18 1989-03-24 Tanaka Precious Metal Ind Method for removing coating metal from metal oxide base material
JP2673380B2 (ja) * 1990-02-20 1997-11-05 三菱電機株式会社 プラズマエッチングの方法

Also Published As

Publication number Publication date
JPS49390A (enrdf_load_stackoverflow) 1974-01-05

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