JPS5021232A - - Google Patents

Info

Publication number
JPS5021232A
JPS5021232A JP7320973A JP7320973A JPS5021232A JP S5021232 A JPS5021232 A JP S5021232A JP 7320973 A JP7320973 A JP 7320973A JP 7320973 A JP7320973 A JP 7320973A JP S5021232 A JPS5021232 A JP S5021232A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7320973A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7320973A priority Critical patent/JPS5021232A/ja
Publication of JPS5021232A publication Critical patent/JPS5021232A/ja
Pending legal-status Critical Current

Links

Classifications

    • Y02E60/12—

Landscapes

  • Cell Electrode Carriers And Collectors (AREA)
JP7320973A 1973-06-28 1973-06-28 Pending JPS5021232A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7320973A JPS5021232A (ja) 1973-06-28 1973-06-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7320973A JPS5021232A (ja) 1973-06-28 1973-06-28

Publications (1)

Publication Number Publication Date
JPS5021232A true JPS5021232A (ja) 1975-03-06

Family

ID=13511520

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7320973A Pending JPS5021232A (ja) 1973-06-28 1973-06-28

Country Status (1)

Country Link
JP (1) JPS5021232A (ja)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56105634A (en) * 1980-01-25 1981-08-22 Fujitsu Ltd X rays transcription device
JPS58128735A (ja) * 1982-01-27 1983-08-01 Hitachi Ltd Ｘ線アライナ
JPS61251025A (ja) * 1985-04-30 1986-11-08 Canon Inc 投影露光装置
JPS6266631A (ja) * 1985-09-19 1987-03-26 Nippon Kogaku Kk <Nikon> ステツプ・アンド・リピ−ト露光装置
JPS62145730A (ja) * 1985-12-19 1987-06-29 Nippon Kogaku Kk <Nikon> 投影型露光装置
JPS62150721A (ja) * 1985-12-24 1987-07-04 Nippon Kogaku Kk <Nikon> 投影型露光装置
JPS62200725A (ja) * 1986-02-28 1987-09-04 Canon Inc 露光装置
JPH03131010U (ja) * 1990-04-17 1991-12-27
JPH06283419A (ja) * 1993-08-23 1994-10-07 Nikon Corp 位置決め装置
JPH0774095A (ja) * 1994-06-20 1995-03-17 Nikon Corp 露光装置
JPH07235486A (ja) * 1994-11-21 1995-09-05 Canon Inc デバイス製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4988053A (ja) * 1972-12-27 1974-08-22

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4988053A (ja) * 1972-12-27 1974-08-22

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56105634A (en) * 1980-01-25 1981-08-22 Fujitsu Ltd X rays transcription device
JPS58128735A (ja) * 1982-01-27 1983-08-01 Hitachi Ltd Ｘ線アライナ
JPS632137B2 (ja) * 1982-01-27 1988-01-18 Hitachi Ltd
JPS61251025A (ja) * 1985-04-30 1986-11-08 Canon Inc 投影露光装置
JPH0515054B2 (ja) * 1985-04-30 1993-02-26 Canon Kk
JPS6266631A (ja) * 1985-09-19 1987-03-26 Nippon Kogaku Kk <Nikon> ステツプ・アンド・リピ−ト露光装置
JPS62145730A (ja) * 1985-12-19 1987-06-29 Nippon Kogaku Kk <Nikon> 投影型露光装置
JPH0581046B2 (ja) * 1985-12-24 1993-11-11 Nippon Kogaku Kk
JPS62150721A (ja) * 1985-12-24 1987-07-04 Nippon Kogaku Kk <Nikon> 投影型露光装置
JPS62200725A (ja) * 1986-02-28 1987-09-04 Canon Inc 露光装置
JPH03131010U (ja) * 1990-04-17 1991-12-27
JPH0743846Y2 (ja) * 1990-04-17 1995-10-09 丸茂電機株式会社 エフェクトパターン
JPH06283419A (ja) * 1993-08-23 1994-10-07 Nikon Corp 位置決め装置
JPH0774095A (ja) * 1994-06-20 1995-03-17 Nikon Corp 露光装置
JPH07235486A (ja) * 1994-11-21 1995-09-05 Canon Inc デバイス製造方法
JP2670984B2 (ja) * 1994-11-21 1997-10-29 キヤノン株式会社 デバイス製造方法

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