JPS501313U - - Google Patents
Info
- Publication number
- JPS501313U JPS501313U JP4972373U JP4972373U JPS501313U JP S501313 U JPS501313 U JP S501313U JP 4972373 U JP4972373 U JP 4972373U JP 4972373 U JP4972373 U JP 4972373U JP S501313 U JPS501313 U JP S501313U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
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- Bag Frames (AREA)
- Packages (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4972373U JPS501313U (ja) | 1973-04-27 | 1973-04-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4972373U JPS501313U (ja) | 1973-04-27 | 1973-04-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS501313U true JPS501313U (ja) | 1975-01-08 |
Family
ID=28191965
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4972373U Pending JPS501313U (ja) | 1973-04-27 | 1973-04-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS501313U (ja) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5314491A (en) * | 1976-07-26 | 1978-02-09 | Nec Corp | Apparatus for grinding double surfaces |
| JPS5349396A (en) * | 1976-10-18 | 1978-05-04 | Nec Corp | Both-side polishing machine |
| JPS54122086A (en) * | 1978-03-16 | 1979-09-21 | Nippon Telegr & Teleph Corp <Ntt> | Simultaneous working method for both surfaces of wafer |
| JPS54122087A (en) * | 1978-03-16 | 1979-09-21 | Nippon Telegr & Teleph Corp <Ntt> | Simultaneous working method for both surfaces of wafer |
| JPS5743429A (en) * | 1980-08-28 | 1982-03-11 | Toshiba Corp | Manufacture of semiconductor device |
| JPH03221368A (ja) * | 1989-11-10 | 1991-09-30 | Fujikoshi Kikai Kogyo Kk | ウエハー加工装置 |
-
1973
- 1973-04-27 JP JP4972373U patent/JPS501313U/ja active Pending
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5314491A (en) * | 1976-07-26 | 1978-02-09 | Nec Corp | Apparatus for grinding double surfaces |
| JPS608185B2 (ja) * | 1976-07-26 | 1985-03-01 | 日本電気株式会社 | 両面研磨装置 |
| JPS5349396A (en) * | 1976-10-18 | 1978-05-04 | Nec Corp | Both-side polishing machine |
| JPS6028634B2 (ja) * | 1976-10-18 | 1985-07-05 | 日本電気株式会社 | 両面研摩装置 |
| JPS54122086A (en) * | 1978-03-16 | 1979-09-21 | Nippon Telegr & Teleph Corp <Ntt> | Simultaneous working method for both surfaces of wafer |
| JPS54122087A (en) * | 1978-03-16 | 1979-09-21 | Nippon Telegr & Teleph Corp <Ntt> | Simultaneous working method for both surfaces of wafer |
| JPS5735575B2 (ja) * | 1978-03-16 | 1982-07-29 | ||
| JPS5743429A (en) * | 1980-08-28 | 1982-03-11 | Toshiba Corp | Manufacture of semiconductor device |
| JPH038111B2 (ja) * | 1980-08-28 | 1991-02-05 | Tokyo Shibaura Electric Co | |
| JPH03221368A (ja) * | 1989-11-10 | 1991-09-30 | Fujikoshi Kikai Kogyo Kk | ウエハー加工装置 |