JPS50117011A - - Google Patents
Info
- Publication number
- JPS50117011A JPS50117011A JP50004322A JP432275A JPS50117011A JP S50117011 A JPS50117011 A JP S50117011A JP 50004322 A JP50004322 A JP 50004322A JP 432275 A JP432275 A JP 432275A JP S50117011 A JPS50117011 A JP S50117011A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IT19143/74A IT1006761B (it) | 1974-01-07 | 1974-01-07 | Impianto e procedimento per l otte nimento di alti vuoti |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS50117011A true JPS50117011A (US07922777-20110412-C00004.png) | 1975-09-12 |
Family
ID=11155208
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50004322A Pending JPS50117011A (US07922777-20110412-C00004.png) | 1974-01-07 | 1975-01-07 |
Country Status (7)
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007127130A (ja) * | 1994-10-31 | 2007-05-24 | Saes Pure Gas Inc | インシトゥーゲッターポンプ装置及び方法 |
Families Citing this family (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE8006128L (sv) * | 1980-09-02 | 1982-03-03 | Bertil Frostenson | Forfarande for komprimering av gasformigt medium samt anordning for utforande av forfarandet |
| IT1201945B (it) * | 1982-05-20 | 1989-02-02 | Getters Spa | Tubazione per il trasporto di fluidi isolata a vuoto e metodo per la sua produzione |
| DE3316454A1 (de) * | 1983-05-05 | 1984-11-22 | kabelmetal electro GmbH, 3000 Hannover | Aus zwei oder mehreren konzentrischen rohren bestehendes rohrsystem |
| US5780313A (en) | 1985-02-14 | 1998-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Method of fabricating semiconductor device |
| US6784033B1 (en) | 1984-02-15 | 2004-08-31 | Semiconductor Energy Laboratory Co., Ltd. | Method for the manufacture of an insulated gate field effect semiconductor device |
| JPS60198394A (ja) * | 1984-03-21 | 1985-10-07 | Anelva Corp | 真空処理装置の排気装置 |
| DE3426641A1 (de) * | 1984-07-19 | 1986-01-23 | kabelmetal electro GmbH, 3000 Hannover | Verfahren zum nachevakuieren von vakuumisolierten konzentrischen rohrleitungen |
| US6786997B1 (en) * | 1984-11-26 | 2004-09-07 | Semiconductor Energy Laboratory Co., Ltd. | Plasma processing apparatus |
| JPH0752718B2 (ja) | 1984-11-26 | 1995-06-05 | 株式会社半導体エネルギー研究所 | 薄膜形成方法 |
| US6230650B1 (en) | 1985-10-14 | 2001-05-15 | Semiconductor Energy Laboratory Co., Ltd. | Microwave enhanced CVD system under magnetic field |
| US6673722B1 (en) | 1985-10-14 | 2004-01-06 | Semiconductor Energy Laboratory Co., Ltd. | Microwave enhanced CVD system under magnetic field |
| GB2231120B (en) * | 1989-04-15 | 1993-02-24 | Btr Plc | Resilient bush |
| US5154582A (en) * | 1991-08-20 | 1992-10-13 | Danielson Associates, Inc. | Rough vacuum pump using bulk getter material |
| US5161955A (en) * | 1991-08-20 | 1992-11-10 | Danielson Associates, Inc. | High vacuum pump using bulk getter material |
| US5401298A (en) * | 1993-09-17 | 1995-03-28 | Leybold Inficon, Inc. | Sorption pump |
| US5610438A (en) * | 1995-03-08 | 1997-03-11 | Texas Instruments Incorporated | Micro-mechanical device with non-evaporable getter |
| US5917140A (en) * | 1996-05-21 | 1999-06-29 | Advanced Technology Materials, Inc. | Sorbent-based fluid storage and dispensing vessel with enhanced heat transfer means |
| US6347925B1 (en) * | 2000-06-29 | 2002-02-19 | Beacon Power Corporation | Flywheel system with parallel pumping arrangement |
| CN100363066C (zh) * | 2000-10-12 | 2008-01-23 | 肾脏治疗公司 | 在体液体外处理中用于体液流动控制的装置和方法 |
| US6627164B1 (en) | 2000-11-28 | 2003-09-30 | Renal Solutions, Inc. | Sodium zirconium carbonate and zirconium basic carbonate and methods of making the same |
| US7033498B2 (en) * | 2000-11-28 | 2006-04-25 | Renal Solutions, Inc. | Cartridges useful in cleaning dialysis solutions |
| US6878283B2 (en) * | 2001-11-28 | 2005-04-12 | Renal Solutions, Inc. | Filter cartridge assemblies and methods for filtering fluids |
| US7998101B2 (en) * | 2003-07-28 | 2011-08-16 | Renal Solutions, Inc. | Devices and methods for body fluid flow control in extracorporeal fluid treatment |
| US10692692B2 (en) * | 2015-05-27 | 2020-06-23 | Kla-Tencor Corporation | System and method for providing a clean environment in an electron-optical system |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3077712A (en) * | 1961-07-14 | 1963-02-19 | Milleron Norman | Vacuum trap and valve combination |
| US3469375A (en) * | 1967-10-16 | 1969-09-30 | Nasa | Sorption vacuum trap |
| DE1764092C3 (de) * | 1968-04-01 | 1974-01-03 | Siemens Ag, 1000 Berlin U. 8000 Muenchen | Gettervorrichtung zum Einbau in elektrische Entladungsgefäße |
-
1974
- 1974-01-07 IT IT19143/74A patent/IT1006761B/it active
-
1975
- 1975-01-06 FR FR7500256A patent/FR2257027B3/fr not_active Expired
- 1975-01-06 GB GB383/75A patent/GB1490243A/en not_active Expired
- 1975-01-07 JP JP50004322A patent/JPS50117011A/ja active Pending
- 1975-01-07 US US05/539,103 patent/US4088456A/en not_active Expired - Lifetime
- 1975-01-07 NL NL7500163A patent/NL7500163A/xx not_active Application Discontinuation
- 1975-01-07 DE DE19752500338 patent/DE2500338A1/de not_active Withdrawn
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007127130A (ja) * | 1994-10-31 | 2007-05-24 | Saes Pure Gas Inc | インシトゥーゲッターポンプ装置及び方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| US4088456A (en) | 1978-05-09 |
| FR2257027B3 (US07922777-20110412-C00004.png) | 1977-09-30 |
| NL7500163A (nl) | 1975-07-09 |
| DE2500338A1 (de) | 1975-07-31 |
| FR2257027A1 (US07922777-20110412-C00004.png) | 1975-08-01 |
| IT1006761B (it) | 1976-10-20 |
| GB1490243A (en) | 1977-10-26 |
