JPS4981949A - - Google Patents

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Publication number
JPS4981949A
JPS4981949A JP47125020A JP12502072A JPS4981949A JP S4981949 A JPS4981949 A JP S4981949A JP 47125020 A JP47125020 A JP 47125020A JP 12502072 A JP12502072 A JP 12502072A JP S4981949 A JPS4981949 A JP S4981949A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47125020A
Other languages
Japanese (ja)
Other versions
JPS5534359B2 (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12502072A priority Critical patent/JPS5534359B2/ja
Publication of JPS4981949A publication Critical patent/JPS4981949A/ja
Publication of JPS5534359B2 publication Critical patent/JPS5534359B2/ja
Expired legal-status Critical Current

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JP12502072A 1972-12-12 1972-12-12 Expired JPS5534359B2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12502072A JPS5534359B2 (ko) 1972-12-12 1972-12-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12502072A JPS5534359B2 (ko) 1972-12-12 1972-12-12

Publications (2)

Publication Number Publication Date
JPS4981949A true JPS4981949A (ko) 1974-08-07
JPS5534359B2 JPS5534359B2 (ko) 1980-09-05

Family

ID=14899858

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12502072A Expired JPS5534359B2 (ko) 1972-12-12 1972-12-12

Country Status (1)

Country Link
JP (1) JPS5534359B2 (ko)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5358408A (en) * 1976-11-08 1978-05-26 Nippon Kokan Kk <Nkk> Water treating method of heat exchanger for exhaust gas treatment
JPS5495176U (ko) * 1977-12-19 1979-07-05
JPS5873391U (ja) * 1981-11-13 1983-05-18 横河電機株式会社 導圧管洗浄装置
JPS58194396U (ja) * 1982-06-18 1983-12-24 岩井機械工業株式会社 プレ−ト式熱交換器に於ける伝熱板の破損検査装置
JPS63281992A (ja) * 1987-05-14 1988-11-18 株式会社 インダック ビ−ルかす洗浄方法およびその装置
JPH05215491A (ja) * 1992-02-05 1993-08-24 Kubota Corp 水熱源用熱交換器
JP2013228402A (ja) * 2013-06-24 2013-11-07 Toshiba Corp 原子力発電所内設備の除染装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58129794A (ja) * 1982-01-29 1983-08-02 ケル株式会社 Icコネクタ
JP6697055B2 (ja) * 2018-11-30 2020-05-20 株式会社Screenホールディングス 基板処理装置および基板処理装置の配管洗浄方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5215822A (en) * 1975-07-29 1977-02-05 Ishihara Sangyo Kaisha Ltd Herbicide

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5215822A (en) * 1975-07-29 1977-02-05 Ishihara Sangyo Kaisha Ltd Herbicide

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5358408A (en) * 1976-11-08 1978-05-26 Nippon Kokan Kk <Nkk> Water treating method of heat exchanger for exhaust gas treatment
JPS5836280B2 (ja) * 1976-11-08 1983-08-08 日本鋼管株式会社 焼結排ガス処理用熱交換器の水処理方法
JPS5495176U (ko) * 1977-12-19 1979-07-05
JPS5842799Y2 (ja) * 1977-12-19 1983-09-28 高砂熱学工業株式会社 コイルの凍結防止処理装置
JPS5873391U (ja) * 1981-11-13 1983-05-18 横河電機株式会社 導圧管洗浄装置
JPS58194396U (ja) * 1982-06-18 1983-12-24 岩井機械工業株式会社 プレ−ト式熱交換器に於ける伝熱板の破損検査装置
JPH037759Y2 (ko) * 1982-06-18 1991-02-26
JPS63281992A (ja) * 1987-05-14 1988-11-18 株式会社 インダック ビ−ルかす洗浄方法およびその装置
JPH05215491A (ja) * 1992-02-05 1993-08-24 Kubota Corp 水熱源用熱交換器
JP2013228402A (ja) * 2013-06-24 2013-11-07 Toshiba Corp 原子力発電所内設備の除染装置

Also Published As

Publication number Publication date
JPS5534359B2 (ko) 1980-09-05

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