JPS4967575A - - Google Patents
Info
- Publication number
- JPS4967575A JPS4967575A JP9807272A JP9807272A JPS4967575A JP S4967575 A JPS4967575 A JP S4967575A JP 9807272 A JP9807272 A JP 9807272A JP 9807272 A JP9807272 A JP 9807272A JP S4967575 A JPS4967575 A JP S4967575A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9807272A JPS529508B2 (ja) | 1972-10-02 | 1972-10-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9807272A JPS529508B2 (ja) | 1972-10-02 | 1972-10-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4967575A true JPS4967575A (ja) | 1974-07-01 |
| JPS529508B2 JPS529508B2 (ja) | 1977-03-16 |
Family
ID=14210128
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9807272A Expired JPS529508B2 (ja) | 1972-10-02 | 1972-10-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS529508B2 (ja) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5176978A (ja) * | 1974-12-27 | 1976-07-03 | Hitachi Ltd | |
| JPS52120562A (en) * | 1976-04-02 | 1977-10-11 | Mitsubishi Electric Corp | Removing method of micro-particle |
| JPS53120377A (en) * | 1977-03-30 | 1978-10-20 | Nec Corp | Laser machining apparatus for correction of photo masks |
| JPS6114640A (ja) * | 1984-06-20 | 1986-01-22 | グールド・インコーポレイテツド | フオトマスクの欠陥修正方法及び装置 |
-
1972
- 1972-10-02 JP JP9807272A patent/JPS529508B2/ja not_active Expired
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5176978A (ja) * | 1974-12-27 | 1976-07-03 | Hitachi Ltd | |
| JPS5341075B2 (ja) * | 1974-12-27 | 1978-10-31 | ||
| JPS52120562A (en) * | 1976-04-02 | 1977-10-11 | Mitsubishi Electric Corp | Removing method of micro-particle |
| JPS53120377A (en) * | 1977-03-30 | 1978-10-20 | Nec Corp | Laser machining apparatus for correction of photo masks |
| JPS5541018B2 (ja) * | 1977-03-30 | 1980-10-21 | ||
| JPS6114640A (ja) * | 1984-06-20 | 1986-01-22 | グールド・インコーポレイテツド | フオトマスクの欠陥修正方法及び装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS529508B2 (ja) | 1977-03-16 |