JPS52120562A - Removing method of micro-particle - Google Patents

Removing method of micro-particle

Info

Publication number
JPS52120562A
JPS52120562A JP3750676A JP3750676A JPS52120562A JP S52120562 A JPS52120562 A JP S52120562A JP 3750676 A JP3750676 A JP 3750676A JP 3750676 A JP3750676 A JP 3750676A JP S52120562 A JPS52120562 A JP S52120562A
Authority
JP
Japan
Prior art keywords
micro
particle
removing method
damaging
remove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3750676A
Other languages
Japanese (ja)
Inventor
Hirozo Takano
Sunao Nishioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP3750676A priority Critical patent/JPS52120562A/en
Publication of JPS52120562A publication Critical patent/JPS52120562A/en
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

PURPOSE: To remove a micro-particle attaching onto the surface of a solid therefrom without damaging the surface using laser beam of an extremely small diameter.
COPYRIGHT: (C)1977,JPO&Japio
JP3750676A 1976-04-02 1976-04-02 Removing method of micro-particle Pending JPS52120562A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3750676A JPS52120562A (en) 1976-04-02 1976-04-02 Removing method of micro-particle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3750676A JPS52120562A (en) 1976-04-02 1976-04-02 Removing method of micro-particle

Publications (1)

Publication Number Publication Date
JPS52120562A true JPS52120562A (en) 1977-10-11

Family

ID=12499403

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3750676A Pending JPS52120562A (en) 1976-04-02 1976-04-02 Removing method of micro-particle

Country Status (1)

Country Link
JP (1) JPS52120562A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63162234A (en) * 1986-12-26 1988-07-05 住友ベークライト株式会社 Manufacture of copper-clad laminated board
KR100441294B1 (en) * 2001-10-30 2004-07-23 주식회사 코미코 Method for cleaning of contaminated porous surface parts

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4967575A (en) * 1972-10-02 1974-07-01

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4967575A (en) * 1972-10-02 1974-07-01

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63162234A (en) * 1986-12-26 1988-07-05 住友ベークライト株式会社 Manufacture of copper-clad laminated board
KR100441294B1 (en) * 2001-10-30 2004-07-23 주식회사 코미코 Method for cleaning of contaminated porous surface parts

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