JPS52120562A - Removing method of micro-particle - Google Patents
Removing method of micro-particleInfo
- Publication number
- JPS52120562A JPS52120562A JP3750676A JP3750676A JPS52120562A JP S52120562 A JPS52120562 A JP S52120562A JP 3750676 A JP3750676 A JP 3750676A JP 3750676 A JP3750676 A JP 3750676A JP S52120562 A JPS52120562 A JP S52120562A
- Authority
- JP
- Japan
- Prior art keywords
- micro
- particle
- removing method
- damaging
- remove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning In General (AREA)
- Drying Of Semiconductors (AREA)
Abstract
PURPOSE: To remove a micro-particle attaching onto the surface of a solid therefrom without damaging the surface using laser beam of an extremely small diameter.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3750676A JPS52120562A (en) | 1976-04-02 | 1976-04-02 | Removing method of micro-particle |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3750676A JPS52120562A (en) | 1976-04-02 | 1976-04-02 | Removing method of micro-particle |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52120562A true JPS52120562A (en) | 1977-10-11 |
Family
ID=12499403
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3750676A Pending JPS52120562A (en) | 1976-04-02 | 1976-04-02 | Removing method of micro-particle |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52120562A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63162234A (en) * | 1986-12-26 | 1988-07-05 | 住友ベークライト株式会社 | Manufacture of copper-clad laminated board |
KR100441294B1 (en) * | 2001-10-30 | 2004-07-23 | 주식회사 코미코 | Method for cleaning of contaminated porous surface parts |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4967575A (en) * | 1972-10-02 | 1974-07-01 |
-
1976
- 1976-04-02 JP JP3750676A patent/JPS52120562A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4967575A (en) * | 1972-10-02 | 1974-07-01 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63162234A (en) * | 1986-12-26 | 1988-07-05 | 住友ベークライト株式会社 | Manufacture of copper-clad laminated board |
KR100441294B1 (en) * | 2001-10-30 | 2004-07-23 | 주식회사 코미코 | Method for cleaning of contaminated porous surface parts |
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