JPS5176978A - - Google Patents

Info

Publication number
JPS5176978A
JPS5176978A JP14864574A JP14864574A JPS5176978A JP S5176978 A JPS5176978 A JP S5176978A JP 14864574 A JP14864574 A JP 14864574A JP 14864574 A JP14864574 A JP 14864574A JP S5176978 A JPS5176978 A JP S5176978A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14864574A
Other versions
JPS5341075B2 (ja
Inventor
Kyoshi Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14864574A priority Critical patent/JPS5341075B2/ja
Publication of JPS5176978A publication Critical patent/JPS5176978A/ja
Publication of JPS5341075B2 publication Critical patent/JPS5341075B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP14864574A 1974-12-27 1974-12-27 Expired JPS5341075B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14864574A JPS5341075B2 (ja) 1974-12-27 1974-12-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14864574A JPS5341075B2 (ja) 1974-12-27 1974-12-27

Publications (2)

Publication Number Publication Date
JPS5176978A true JPS5176978A (ja) 1976-07-03
JPS5341075B2 JPS5341075B2 (ja) 1978-10-31

Family

ID=15457418

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14864574A Expired JPS5341075B2 (ja) 1974-12-27 1974-12-27

Country Status (1)

Country Link
JP (1) JPS5341075B2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55157537U (ja) * 1979-04-28 1980-11-12
JPS6114640A (ja) * 1984-06-20 1986-01-22 グールド・インコーポレイテツド フオトマスクの欠陥修正方法及び装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4967575A (ja) * 1972-10-02 1974-07-01

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4967575A (ja) * 1972-10-02 1974-07-01

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55157537U (ja) * 1979-04-28 1980-11-12
JPS6114640A (ja) * 1984-06-20 1986-01-22 グールド・インコーポレイテツド フオトマスクの欠陥修正方法及び装置

Also Published As

Publication number Publication date
JPS5341075B2 (ja) 1978-10-31

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