JPS5176978A - - Google Patents
Info
- Publication number
- JPS5176978A JPS5176978A JP14864574A JP14864574A JPS5176978A JP S5176978 A JPS5176978 A JP S5176978A JP 14864574 A JP14864574 A JP 14864574A JP 14864574 A JP14864574 A JP 14864574A JP S5176978 A JPS5176978 A JP S5176978A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14864574A JPS5341075B2 (ja) | 1974-12-27 | 1974-12-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14864574A JPS5341075B2 (ja) | 1974-12-27 | 1974-12-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5176978A true JPS5176978A (ja) | 1976-07-03 |
JPS5341075B2 JPS5341075B2 (ja) | 1978-10-31 |
Family
ID=15457418
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14864574A Expired JPS5341075B2 (ja) | 1974-12-27 | 1974-12-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5341075B2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55157537U (ja) * | 1979-04-28 | 1980-11-12 | ||
JPS6114640A (ja) * | 1984-06-20 | 1986-01-22 | グールド・インコーポレイテツド | フオトマスクの欠陥修正方法及び装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4967575A (ja) * | 1972-10-02 | 1974-07-01 |
-
1974
- 1974-12-27 JP JP14864574A patent/JPS5341075B2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4967575A (ja) * | 1972-10-02 | 1974-07-01 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55157537U (ja) * | 1979-04-28 | 1980-11-12 | ||
JPS6114640A (ja) * | 1984-06-20 | 1986-01-22 | グールド・インコーポレイテツド | フオトマスクの欠陥修正方法及び装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS5341075B2 (ja) | 1978-10-31 |